GB738121A - Improvements in or relating to variable magnetic electron lenses - Google Patents
Improvements in or relating to variable magnetic electron lensesInfo
- Publication number
- GB738121A GB738121A GB25187/53A GB2518753A GB738121A GB 738121 A GB738121 A GB 738121A GB 25187/53 A GB25187/53 A GB 25187/53A GB 2518753 A GB2518753 A GB 2518753A GB 738121 A GB738121 A GB 738121A
- Authority
- GB
- United Kingdom
- Prior art keywords
- insert
- sept
- relating
- electron lenses
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 230000004075 alteration Effects 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electron Tubes For Measurement (AREA)
- Electron Beam Exposure (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL314474X | 1952-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB738121A true GB738121A (en) | 1955-10-05 |
Family
ID=19783758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB25187/53A Expired GB738121A (en) | 1952-09-16 | 1953-09-11 | Improvements in or relating to variable magnetic electron lenses |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US2880324A (pt) |
| BE (1) | BE522811A (pt) |
| CH (1) | CH314474A (pt) |
| DE (1) | DE1006984B (pt) |
| FR (1) | FR1083345A (pt) |
| GB (1) | GB738121A (pt) |
| NL (2) | NL85499C (pt) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3300681A (en) * | 1965-10-22 | 1967-01-24 | Gen Electric | Adjustable magnet for a magnetron |
| US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
| FR2597259A1 (fr) * | 1986-04-15 | 1987-10-16 | Thomson Csf | Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE904095C (de) * | 1940-06-01 | 1954-02-15 | Siemens Ag | Als Objektiv fuer ein Elektronenmikroskop dienende Elektronenlinse |
| US2356535A (en) * | 1940-08-31 | 1944-08-22 | Ruska Ernst | Electronic lens |
| US2295403A (en) * | 1940-11-15 | 1942-09-08 | Rca Corp | Apertured electron lens and method of alignment |
| DE898217C (de) * | 1943-01-27 | 1953-11-30 | Siemens Ag | Anordnung zur Veraenderung der mit einer magnetischen Elektronenlinse erzielbaren Vergroesserungen |
| US2369782A (en) * | 1943-04-01 | 1945-02-20 | Rca Corp | Electron lens system |
| NL89013C (pt) * | 1944-05-31 | |||
| GB609480A (en) * | 1944-09-30 | 1948-10-01 | Otto Ernst Heinrich Klemperer | Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed |
| US2567674A (en) * | 1949-11-08 | 1951-09-11 | Rca Corp | Velocity modulated electron discharge device |
| US2587942A (en) * | 1949-12-27 | 1952-03-04 | Leitz Ernst Gmbh | Electronic optical correction mechanism for magnetic lenses |
| US2679018A (en) * | 1950-06-30 | 1954-05-18 | Rca Corp | Magnetic electron lens pole piece |
-
0
- BE BE522811D patent/BE522811A/xx unknown
- NL NLAANVRAGE7313365,A patent/NL172506B/xx unknown
- NL NL85499D patent/NL85499C/xx active
-
1953
- 1953-09-11 GB GB25187/53A patent/GB738121A/en not_active Expired
- 1953-09-11 US US379716A patent/US2880324A/en not_active Expired - Lifetime
- 1953-09-12 DE DEN7734A patent/DE1006984B/de active Pending
- 1953-09-14 FR FR1083345D patent/FR1083345A/fr not_active Expired
- 1953-09-14 CH CH314474D patent/CH314474A/de unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CH314474A (de) | 1956-06-15 |
| NL172506B (nl) | |
| DE1006984B (de) | 1957-04-25 |
| BE522811A (pt) | |
| FR1083345A (fr) | 1955-01-07 |
| NL85499C (pt) | |
| US2880324A (en) | 1959-03-31 |
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