GB894569A - A device for compensating axial astigmatism of electron lenses - Google Patents

A device for compensating axial astigmatism of electron lenses

Info

Publication number
GB894569A
GB894569A GB14052/59A GB1405259A GB894569A GB 894569 A GB894569 A GB 894569A GB 14052/59 A GB14052/59 A GB 14052/59A GB 1405259 A GB1405259 A GB 1405259A GB 894569 A GB894569 A GB 894569A
Authority
GB
United Kingdom
Prior art keywords
stigmator
electron lenses
april
pole
passed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB14052/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla AS
Original Assignee
Tesla AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla AS filed Critical Tesla AS
Publication of GB894569A publication Critical patent/GB894569A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

894,569. Electron miscroscopes. TESLA, NARODNI PODNIK. April 24, 1959 [April 24, 1958], No. 14052/59. Class 39 (1). Astigmatism in the objective lens 1, 2 of an electron microscope is corrected by a 4-pole stigmator 3 which is disposed outside the vacuum space and which is mechanically displaceable in a plane perpendicular to the axis of the lens. The stigmator is excited by field windings 4 through which adjustable direct current is passed. An alternating current may also be passed to enable centering of the field of the system. The stigmator is also mechanically rotatable. The stigmator may be disposed between the pole-pieces of the objective.
GB14052/59A 1958-04-24 1959-04-24 A device for compensating axial astigmatism of electron lenses Expired GB894569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS894569X 1958-04-24

Publications (1)

Publication Number Publication Date
GB894569A true GB894569A (en) 1962-04-26

Family

ID=5456581

Family Applications (1)

Application Number Title Priority Date Filing Date
GB14052/59A Expired GB894569A (en) 1958-04-24 1959-04-24 A device for compensating axial astigmatism of electron lenses

Country Status (2)

Country Link
DE (1) DE1187335B (en)
GB (1) GB894569A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102509689A (en) * 2011-11-08 2012-06-20 北京航空航天大学 Objective anastigmator of electronic microscope
WO2022246895A1 (en) * 2021-05-27 2022-12-01 中科晶源微电子技术（北京）有限公司 Centering mechanism and scanning electron microscope comprising same
WO2023232283A1 (en) 2022-06-03 2023-12-07 Carl Zeiss Multisem Gmbh Multi-beam particle microscope with improved alignment and method for aligning the multi-beam particle microscope, and computer program product

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE842087C (en) * 1945-07-09 1952-06-23 Cinema Television Ltd Arrangement for holding the focusing devices of electron discharge tubes
DE855287C (en) * 1948-10-02 1952-11-10 Sueddeutsche Lab G M B H Lenses and lens systems for electron optical imaging
DE942518C (en) * 1948-10-02 1956-05-03 Zeiss Carl Fa Device for compensating the symmetry errors of electron lenses
NL163078B (en) * 1948-10-02 Dolby Laboratories Inc DEVICE FOR ATTENUATING AUDIO NOISE.
DE873729C (en) * 1950-11-21 1953-04-16 Sueddeutsche Lab G M B H Device for reducing the astigmatic error of electron-optical systems
DE961735C (en) * 1953-03-19 1957-04-11 Fernseh Gmbh Method for centering the electron beam, especially for television picture tubes, with a permanent magnet surrounding the beam axis in a ring shape and arrangement for carrying out the method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102509689A (en) * 2011-11-08 2012-06-20 北京航空航天大学 Objective anastigmator of electronic microscope
WO2022246895A1 (en) * 2021-05-27 2022-12-01 中科晶源微电子技术（北京）有限公司 Centering mechanism and scanning electron microscope comprising same
WO2023232283A1 (en) 2022-06-03 2023-12-07 Carl Zeiss Multisem Gmbh Multi-beam particle microscope with improved alignment and method for aligning the multi-beam particle microscope, and computer program product

Also Published As

Publication number Publication date
DE1187335B (en) 1965-02-18

Similar Documents

Publication Publication Date Title
GB659804A (en) Improvements in or relating to magnetic induction accelerators
GB478410A (en) Improvements in or relating to cathode ray tubes
GB1459281A (en) Electron microscopes
GB934661A (en) Improvements in and relating to cathode ray tubes
GB894569A (en) A device for compensating axial astigmatism of electron lenses
GB665094A (en) Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
ES438667A1 (en) Method and system for automatically correcting aberrations of a beam of charged particles
GB691156A (en) Improvements in or relating to corpuscular ray apparatus
GB739068A (en) Improvements in or relating to cathode ray tube arrangements
GB699830A (en) Improvements in magnetic electron lenses
GB735272A (en) Improvements in or relating to adjustable magnetic electron lenses
GB1355252A (en) Electron lenses of the magnetic field type
GB833249A (en) Improvements in or relating to electron microscopes
GB773240A (en) Improvements in or relating to arrangements for compensating for axial astigmatism in electron lenses
GB517680A (en) Improvements in or relating to magnetic lenses for electron beam apparatus
GB738121A (en) Improvements in or relating to variable magnetic electron lenses
GB921585A (en) Improvements in or relating to the compensation of the apertural defect of electron optical lenses
GB834542A (en) Improvements in or relating to a cathode ray tube arrangement
SU524256A1 (en) Method of compensating the astigmatism of electromagnetic lenses
GB766158A (en) A beam generating system for cathode-ray tubes employing an ion trap
GB709827A (en) Improvements in or relating to deflection systems for cathode ray tubes
GB928168A (en) Improvements in or relating to mass filters including an electron impact source of ions
GB847266A (en) Improvements relating to electron lenses
GB865369A (en) Improvements in or relating to electron-microscopes
SU109277A1 (en) Lens for electron-optical system