CH314474A - Polschuh für eine magnetische Elektronenlinse - Google Patents

Polschuh für eine magnetische Elektronenlinse

Info

Publication number
CH314474A
CH314474A CH314474DA CH314474A CH 314474 A CH314474 A CH 314474A CH 314474D A CH314474D A CH 314474DA CH 314474 A CH314474 A CH 314474A
Authority
CH
Switzerland
Prior art keywords
pole piece
electron lens
magnetic electron
magnetic
lens
Prior art date
Application number
Other languages
English (en)
Inventor
Cornelis Van Dorsten Adrianus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH314474A publication Critical patent/CH314474A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lenses (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)
CH314474D 1952-09-16 1953-09-14 Polschuh für eine magnetische Elektronenlinse CH314474A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL314474X 1952-09-16

Publications (1)

Publication Number Publication Date
CH314474A true CH314474A (de) 1956-06-15

Family

ID=19783758

Family Applications (1)

Application Number Title Priority Date Filing Date
CH314474D CH314474A (de) 1952-09-16 1953-09-14 Polschuh für eine magnetische Elektronenlinse

Country Status (7)

Country Link
US (1) US2880324A (de)
BE (1) BE522811A (de)
CH (1) CH314474A (de)
DE (1) DE1006984B (de)
FR (1) FR1083345A (de)
GB (1) GB738121A (de)
NL (2) NL172506B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3300681A (en) * 1965-10-22 1967-01-24 Gen Electric Adjustable magnet for a magnetron
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904095C (de) * 1940-06-01 1954-02-15 Siemens Ag Als Objektiv fuer ein Elektronenmikroskop dienende Elektronenlinse
US2356535A (en) * 1940-08-31 1944-08-22 Ruska Ernst Electronic lens
US2295403A (en) * 1940-11-15 1942-09-08 Rca Corp Apertured electron lens and method of alignment
DE898217C (de) * 1943-01-27 1953-11-30 Siemens Ag Anordnung zur Veraenderung der mit einer magnetischen Elektronenlinse erzielbaren Vergroesserungen
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
NL89013C (de) * 1944-05-31
GB609480A (en) * 1944-09-30 1948-10-01 Otto Ernst Heinrich Klemperer Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed
US2567674A (en) * 1949-11-08 1951-09-11 Rca Corp Velocity modulated electron discharge device
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece

Also Published As

Publication number Publication date
NL85499C (de)
NL172506B (nl)
FR1083345A (fr) 1955-01-07
GB738121A (en) 1955-10-05
US2880324A (en) 1959-03-31
BE522811A (de)
DE1006984B (de) 1957-04-25

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