GB753562A - Improvements in or relating to magnetic electron lenses - Google Patents

Improvements in or relating to magnetic electron lenses

Info

Publication number
GB753562A
GB753562A GB3254/52A GB325452A GB753562A GB 753562 A GB753562 A GB 753562A GB 3254/52 A GB3254/52 A GB 3254/52A GB 325452 A GB325452 A GB 325452A GB 753562 A GB753562 A GB 753562A
Authority
GB
United Kingdom
Prior art keywords
degrees
electron
polepieces
magnification
lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3254/52A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB753562A publication Critical patent/GB753562A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58Arrangements for focusing or reflecting ray or beam
    • H01J29/64Magnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)

Abstract

753,562. Electron lenses. PHILIPS ELECTRICAL INDUSTRIES, Ltd. Feb. 7, 1952 [Feb. 10, 1951], No. 3254/52. Class 39 (1). A transverse-field magnetic lens exhibiting focusing in both the axial and radial directions comprises two polepieces forming sectors not greater than 270 degrees of surfaces of revolution, one polepiece having a profile which is parabolic and the other being the equatorial plane or the mirror image of the first polepiece in that plane, and the mean angle between a tangent and the plane being less than 15 degrees; the parabola may be replaced by a tangent or any closer approximation. As shown, the polepieces 5, 7, Fig. 3, have parabolic profiles 8, 9, the parabola being centred at the axis 6 and the tangents 16, 17 at points opposite the principal ray 12 intercepting on the axis a distance b which is half the pole separation a. The angle #, Fig. 2, is preferably between 120 and 135 degrees, the maximum power being attained at an angle of 127 degrees; Fig. 2 shows the shift of focus as the electron velocity varies. An electron microscope in which this chromatic aberration is compensated employs two successive sectoral lenses 26, 30, Fig. 4, of magnification 7 and an electron mirror formed by gun anode 24 of magnification 100, thus giving a final image at 33 of magnification 5000. It is shown that chromate aberration is eliminated if the relation R2(1+V2)=R1V2(1+V1) is observed between the radii of the rays R1, R2 and the magnifications V1, V2 in the first and second lenses respectively. The polepieces may be permanent magnets.
GB3254/52A 1951-02-10 1952-02-07 Improvements in or relating to magnetic electron lenses Expired GB753562A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL302299X 1951-02-10

Publications (1)

Publication Number Publication Date
GB753562A true GB753562A (en) 1956-07-25

Family

ID=19783341

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3254/52A Expired GB753562A (en) 1951-02-10 1952-02-07 Improvements in or relating to magnetic electron lenses

Country Status (6)

Country Link
US (1) US2777958A (en)
BE (1) BE509097A (en)
CH (1) CH302299A (en)
DE (1) DE911878C (en)
FR (1) FR1058851A (en)
GB (1) GB753562A (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2872574A (en) * 1956-04-12 1959-02-03 Edwin M Mcmillan Cloverleaf cyclotron
GB846898A (en) * 1956-10-25 1960-08-31 Nat Res Dev Improvements in or relating to electrion lenses
NL91617C (en) * 1957-02-16 1900-01-01
NL225017A (en) * 1957-02-19
US2931903A (en) * 1957-06-17 1960-04-05 High Voltage Engineering Corp Acceleration and application of high intensity electron beams for radiation processing
US3360647A (en) * 1964-09-14 1967-12-26 Varian Associates Electron accelerator with specific deflecting magnet structure and x-ray target
CH393535A (en) * 1961-09-26 1965-06-15 Trueb Taeuber & Co Ag Magnet arrangement for generating magnetic fields of variable field strength with constant geometric configuration
US3243667A (en) * 1962-04-09 1966-03-29 High Voltage Engineering Corp Non dispersive magnetic deflection apparatus and method
GB1074625A (en) * 1963-04-24 1967-07-05 Ass Elect Ind Improvements relating to magnetic spectrometers
US3379911A (en) * 1965-06-11 1968-04-23 High Voltage Engineering Corp Particle accelerator provided with an adjustable 270deg. non-dispersive magnetic charged-particle beam bender
US3516037A (en) * 1967-12-05 1970-06-02 High Voltage Engineering Corp Nondispersive magnetic deflection method
FR2036373A5 (en) * 1969-03-12 1970-12-24 Thomson Csf
FR2043973A5 (en) * 1969-05-05 1971-02-19 Thomson Csf
US3659236A (en) * 1970-08-05 1972-04-25 Us Air Force Inhomogeneity variable magnetic field magnet
NL7012758A (en) * 1970-08-28 1972-03-01
US3655902A (en) * 1970-10-19 1972-04-11 Air Reduction Heating system for electron beam furnace
US3673528A (en) * 1971-03-01 1972-06-27 Gen Electric Wide frequency response line scan magnetic deflector
US4281251A (en) * 1979-08-06 1981-07-28 Radiation Dynamics, Inc. Scanning beam deflection system and method
US4922106A (en) * 1986-04-09 1990-05-01 Varian Associates, Inc. Ion beam scanning method and apparatus
US4980562A (en) * 1986-04-09 1990-12-25 Varian Associates, Inc. Method and apparatus for high efficiency scanning in an ion implanter
US4745281A (en) * 1986-08-25 1988-05-17 Eclipse Ion Technology, Inc. Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field
US5053627A (en) * 1990-03-01 1991-10-01 Ibis Technology Corporation Apparatus for ion implantation
US5279723A (en) * 1992-07-30 1994-01-18 As Represented By The United States Department Of Energy Filtered cathodic arc source
US5319339A (en) * 1993-03-08 1994-06-07 The United States Of America As Represented By The Secretary Of The Army Tubular structure having transverse magnetic field with gradient
AU1067799A (en) * 1997-10-07 1999-04-27 Sti Optronics Inc. Magnetic separator for linear dispersion and method for producing the same
US6677599B2 (en) * 2000-03-27 2004-01-13 Applied Materials, Inc. System and method for uniformly implanting a wafer with an ion beam
AU2001270133A1 (en) 2000-06-22 2002-01-02 Proteros, Llc Ion implantation uniformity correction using beam current control

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636999A (en) * 1953-04-28 x x x x i
DE639469C (en) * 1934-12-20 1936-12-10 Fernseh Akt Ges Magnetic-electrical deflection system for Braun tubes, especially for television purposes
US2272165A (en) * 1938-03-01 1942-02-03 Univ Leland Stanford Junior High frequency electrical apparatus
US2260041A (en) * 1939-03-22 1941-10-21 Gen Electric Electron microscope
US2469964A (en) * 1941-05-03 1949-05-10 Bell Telephone Labor Inc Electron discharge apparatus
US2551544A (en) * 1944-09-20 1951-05-01 Alfred O C Nicr Mass spectrometer
US2457495A (en) * 1944-12-18 1948-12-28 Sylvania Electric Prod Ultra high frequency tube
US2447260A (en) * 1945-06-21 1948-08-17 Research Corp Electron microspectroscope
US2429558A (en) * 1945-08-24 1947-10-21 Research Corp Electron beam monochromator
US2435386A (en) * 1946-07-27 1948-02-03 Rca Corp Electron diffraction camera
US2533687A (en) * 1949-05-27 1950-12-12 Quam Nichols Company Magnetic focusing device

Also Published As

Publication number Publication date
US2777958A (en) 1957-01-15
BE509097A (en)
CH302299A (en) 1954-10-15
DE911878C (en) 1954-05-20
FR1058851A (en) 1954-03-19

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