GB753562A - Improvements in or relating to magnetic electron lenses - Google Patents
Improvements in or relating to magnetic electron lensesInfo
- Publication number
- GB753562A GB753562A GB3254/52A GB325452A GB753562A GB 753562 A GB753562 A GB 753562A GB 3254/52 A GB3254/52 A GB 3254/52A GB 325452 A GB325452 A GB 325452A GB 753562 A GB753562 A GB 753562A
- Authority
- GB
- United Kingdom
- Prior art keywords
- degrees
- electron
- polepieces
- magnification
- lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004075 alteration Effects 0.000 abstract 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
- H01J29/64—Magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Electron Beam Exposure (AREA)
Abstract
753,562. Electron lenses. PHILIPS ELECTRICAL INDUSTRIES, Ltd. Feb. 7, 1952 [Feb. 10, 1951], No. 3254/52. Class 39 (1). A transverse-field magnetic lens exhibiting focusing in both the axial and radial directions comprises two polepieces forming sectors not greater than 270 degrees of surfaces of revolution, one polepiece having a profile which is parabolic and the other being the equatorial plane or the mirror image of the first polepiece in that plane, and the mean angle between a tangent and the plane being less than 15 degrees; the parabola may be replaced by a tangent or any closer approximation. As shown, the polepieces 5, 7, Fig. 3, have parabolic profiles 8, 9, the parabola being centred at the axis 6 and the tangents 16, 17 at points opposite the principal ray 12 intercepting on the axis a distance b which is half the pole separation a. The angle #, Fig. 2, is preferably between 120 and 135 degrees, the maximum power being attained at an angle of 127 degrees; Fig. 2 shows the shift of focus as the electron velocity varies. An electron microscope in which this chromatic aberration is compensated employs two successive sectoral lenses 26, 30, Fig. 4, of magnification 7 and an electron mirror formed by gun anode 24 of magnification 100, thus giving a final image at 33 of magnification 5000. It is shown that chromate aberration is eliminated if the relation R2(1+V2)=R1V2(1+V1) is observed between the radii of the rays R1, R2 and the magnifications V1, V2 in the first and second lenses respectively. The polepieces may be permanent magnets.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL302299X | 1951-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB753562A true GB753562A (en) | 1956-07-25 |
Family
ID=19783341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3254/52A Expired GB753562A (en) | 1951-02-10 | 1952-02-07 | Improvements in or relating to magnetic electron lenses |
Country Status (6)
Country | Link |
---|---|
US (1) | US2777958A (en) |
BE (1) | BE509097A (en) |
CH (1) | CH302299A (en) |
DE (1) | DE911878C (en) |
FR (1) | FR1058851A (en) |
GB (1) | GB753562A (en) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2872574A (en) * | 1956-04-12 | 1959-02-03 | Edwin M Mcmillan | Cloverleaf cyclotron |
GB846898A (en) * | 1956-10-25 | 1960-08-31 | Nat Res Dev | Improvements in or relating to electrion lenses |
NL91617C (en) * | 1957-02-16 | 1900-01-01 | ||
NL225017A (en) * | 1957-02-19 | |||
US2931903A (en) * | 1957-06-17 | 1960-04-05 | High Voltage Engineering Corp | Acceleration and application of high intensity electron beams for radiation processing |
US3360647A (en) * | 1964-09-14 | 1967-12-26 | Varian Associates | Electron accelerator with specific deflecting magnet structure and x-ray target |
CH393535A (en) * | 1961-09-26 | 1965-06-15 | Trueb Taeuber & Co Ag | Magnet arrangement for generating magnetic fields of variable field strength with constant geometric configuration |
US3243667A (en) * | 1962-04-09 | 1966-03-29 | High Voltage Engineering Corp | Non dispersive magnetic deflection apparatus and method |
GB1074625A (en) * | 1963-04-24 | 1967-07-05 | Ass Elect Ind | Improvements relating to magnetic spectrometers |
US3379911A (en) * | 1965-06-11 | 1968-04-23 | High Voltage Engineering Corp | Particle accelerator provided with an adjustable 270deg. non-dispersive magnetic charged-particle beam bender |
US3516037A (en) * | 1967-12-05 | 1970-06-02 | High Voltage Engineering Corp | Nondispersive magnetic deflection method |
FR2036373A5 (en) * | 1969-03-12 | 1970-12-24 | Thomson Csf | |
FR2043973A5 (en) * | 1969-05-05 | 1971-02-19 | Thomson Csf | |
US3659236A (en) * | 1970-08-05 | 1972-04-25 | Us Air Force | Inhomogeneity variable magnetic field magnet |
NL7012758A (en) * | 1970-08-28 | 1972-03-01 | ||
US3655902A (en) * | 1970-10-19 | 1972-04-11 | Air Reduction | Heating system for electron beam furnace |
US3673528A (en) * | 1971-03-01 | 1972-06-27 | Gen Electric | Wide frequency response line scan magnetic deflector |
US4281251A (en) * | 1979-08-06 | 1981-07-28 | Radiation Dynamics, Inc. | Scanning beam deflection system and method |
US4922106A (en) * | 1986-04-09 | 1990-05-01 | Varian Associates, Inc. | Ion beam scanning method and apparatus |
US4980562A (en) * | 1986-04-09 | 1990-12-25 | Varian Associates, Inc. | Method and apparatus for high efficiency scanning in an ion implanter |
US4745281A (en) * | 1986-08-25 | 1988-05-17 | Eclipse Ion Technology, Inc. | Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field |
US5053627A (en) * | 1990-03-01 | 1991-10-01 | Ibis Technology Corporation | Apparatus for ion implantation |
US5279723A (en) * | 1992-07-30 | 1994-01-18 | As Represented By The United States Department Of Energy | Filtered cathodic arc source |
US5319339A (en) * | 1993-03-08 | 1994-06-07 | The United States Of America As Represented By The Secretary Of The Army | Tubular structure having transverse magnetic field with gradient |
AU1067799A (en) * | 1997-10-07 | 1999-04-27 | Sti Optronics Inc. | Magnetic separator for linear dispersion and method for producing the same |
US6677599B2 (en) * | 2000-03-27 | 2004-01-13 | Applied Materials, Inc. | System and method for uniformly implanting a wafer with an ion beam |
AU2001270133A1 (en) | 2000-06-22 | 2002-01-02 | Proteros, Llc | Ion implantation uniformity correction using beam current control |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2636999A (en) * | 1953-04-28 | x x x x i | ||
DE639469C (en) * | 1934-12-20 | 1936-12-10 | Fernseh Akt Ges | Magnetic-electrical deflection system for Braun tubes, especially for television purposes |
US2272165A (en) * | 1938-03-01 | 1942-02-03 | Univ Leland Stanford Junior | High frequency electrical apparatus |
US2260041A (en) * | 1939-03-22 | 1941-10-21 | Gen Electric | Electron microscope |
US2469964A (en) * | 1941-05-03 | 1949-05-10 | Bell Telephone Labor Inc | Electron discharge apparatus |
US2551544A (en) * | 1944-09-20 | 1951-05-01 | Alfred O C Nicr | Mass spectrometer |
US2457495A (en) * | 1944-12-18 | 1948-12-28 | Sylvania Electric Prod | Ultra high frequency tube |
US2447260A (en) * | 1945-06-21 | 1948-08-17 | Research Corp | Electron microspectroscope |
US2429558A (en) * | 1945-08-24 | 1947-10-21 | Research Corp | Electron beam monochromator |
US2435386A (en) * | 1946-07-27 | 1948-02-03 | Rca Corp | Electron diffraction camera |
US2533687A (en) * | 1949-05-27 | 1950-12-12 | Quam Nichols Company | Magnetic focusing device |
-
0
- BE BE509097D patent/BE509097A/xx unknown
-
1952
- 1952-01-14 US US266298A patent/US2777958A/en not_active Expired - Lifetime
- 1952-02-06 DE DEN5053A patent/DE911878C/en not_active Expired
- 1952-02-07 GB GB3254/52A patent/GB753562A/en not_active Expired
- 1952-02-08 FR FR1058851D patent/FR1058851A/en not_active Expired
- 1952-02-08 CH CH302299D patent/CH302299A/en unknown
Also Published As
Publication number | Publication date |
---|---|
US2777958A (en) | 1957-01-15 |
BE509097A (en) | |
CH302299A (en) | 1954-10-15 |
DE911878C (en) | 1954-05-20 |
FR1058851A (en) | 1954-03-19 |
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