GB2190241B - Method of making a semiconductor device - Google Patents

Method of making a semiconductor device

Info

Publication number
GB2190241B
GB2190241B GB8710281A GB8710281A GB2190241B GB 2190241 B GB2190241 B GB 2190241B GB 8710281 A GB8710281 A GB 8710281A GB 8710281 A GB8710281 A GB 8710281A GB 2190241 B GB2190241 B GB 2190241B
Authority
GB
United Kingdom
Prior art keywords
making
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8710281A
Other languages
English (en)
Other versions
GB8710281D0 (en
GB2190241A (en
Inventor
Isamu Namose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62053453A external-priority patent/JPS63184352A/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of GB8710281D0 publication Critical patent/GB8710281D0/en
Publication of GB2190241A publication Critical patent/GB2190241A/en
Application granted granted Critical
Publication of GB2190241B publication Critical patent/GB2190241B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
    • H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76237—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials introducing impurities in trench side or bottom walls, e.g. for forming channel stoppers or alter isolation behavior

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
GB8710281A 1986-05-09 1987-04-30 Method of making a semiconductor device Expired GB2190241B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10596586 1986-05-09
JP22770986 1986-09-26
JP62053453A JPS63184352A (ja) 1986-05-09 1987-03-09 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
GB8710281D0 GB8710281D0 (en) 1987-06-03
GB2190241A GB2190241A (en) 1987-11-11
GB2190241B true GB2190241B (en) 1989-12-13

Family

ID=27294953

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8710281A Expired GB2190241B (en) 1986-05-09 1987-04-30 Method of making a semiconductor device

Country Status (6)

Country Link
DE (1) DE3715092A1 (de)
FR (1) FR2598557B1 (de)
GB (1) GB2190241B (de)
HK (1) HK28791A (de)
NL (1) NL190591C (de)
SG (1) SG60090G (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1189143B (it) * 1986-05-16 1988-01-28 Sgs Microelettronica Spa Procedimento per la realizzazione dell'isolamento di circuiti integrati a elevatissima scala d'integrazione,in particolare in tecnologia mos e cmos
JPH0442948A (ja) * 1990-06-06 1992-02-13 Mitsubishi Electric Corp 半導体装置の製造方法
KR920020676A (ko) * 1991-04-09 1992-11-21 김광호 반도체 장치의 소자분리 방법
JPH0574927A (ja) * 1991-09-13 1993-03-26 Nec Corp 半導体装置の製造方法
KR0147630B1 (ko) * 1995-04-21 1998-11-02 김광호 반도체 장치의 소자분리방법
KR980006053A (ko) * 1996-06-26 1998-03-30 문정환 반도체장치의 격리막 형성방법
CN102683290A (zh) * 2011-03-08 2012-09-19 无锡华润上华半导体有限公司 Rom器件及其制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0044082A2 (de) * 1980-07-16 1982-01-20 Kabushiki Kaisha Toshiba Verfahren zur Herstellung einer Halbleiteranordnung mit einer dielektrischen isolierenden Zone

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL170348C (nl) * 1970-07-10 1982-10-18 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een tegen dotering en tegen thermische oxydatie maskerend masker wordt aangebracht, de door de vensters in het masker vrijgelaten delen van het oppervlak worden onderworpen aan een etsbehandeling voor het vormen van verdiepingen en het halfgeleiderlichaam met het masker wordt onderworpen aan een thermische oxydatiebehandeling voor het vormen van een oxydepatroon dat de verdiepingen althans ten dele opvult.
JPS5578540A (en) * 1978-12-08 1980-06-13 Hitachi Ltd Manufacture of semiconductor device
US4238278A (en) * 1979-06-14 1980-12-09 International Business Machines Corporation Polycrystalline silicon oxidation method for making shallow and deep isolation trenches
JPS5694646A (en) * 1979-12-28 1981-07-31 Fujitsu Ltd Forming method for oxidized film
JPS5694647A (en) * 1979-12-28 1981-07-31 Fujitsu Ltd Forming method for oxidized film
JPS5893342A (ja) * 1981-11-30 1983-06-03 Toshiba Corp 半導体装置の製造方法
US4435446A (en) * 1982-11-15 1984-03-06 Hewlett-Packard Company Edge seal with polysilicon in LOCOS process
JPS6054453A (ja) * 1983-09-05 1985-03-28 Oki Electric Ind Co Ltd 半導体集積回路装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0044082A2 (de) * 1980-07-16 1982-01-20 Kabushiki Kaisha Toshiba Verfahren zur Herstellung einer Halbleiteranordnung mit einer dielektrischen isolierenden Zone

Also Published As

Publication number Publication date
DE3715092C2 (de) 1993-07-29
NL8701087A (nl) 1987-12-01
FR2598557A1 (fr) 1987-11-13
NL190591B (nl) 1993-12-01
DE3715092A1 (de) 1987-11-12
HK28791A (en) 1991-04-26
FR2598557B1 (fr) 1990-03-30
SG60090G (en) 1990-09-07
GB8710281D0 (en) 1987-06-03
NL190591C (nl) 1994-05-02
GB2190241A (en) 1987-11-11

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20070429