GB2063562A - Thin film sensor - Google Patents
Thin film sensor Download PDFInfo
- Publication number
- GB2063562A GB2063562A GB8035793A GB8035793A GB2063562A GB 2063562 A GB2063562 A GB 2063562A GB 8035793 A GB8035793 A GB 8035793A GB 8035793 A GB8035793 A GB 8035793A GB 2063562 A GB2063562 A GB 2063562A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- thin film
- sensor structure
- forming
- film sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 38
- 230000001681 protective effect Effects 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 90
- 238000000151 deposition Methods 0.000 claims description 17
- 239000011241 protective layer Substances 0.000 claims description 11
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007666 vacuum forming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9383479A | 1979-11-13 | 1979-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB2063562A true GB2063562A (en) | 1981-06-03 |
Family
ID=22241068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB8035793A Withdrawn GB2063562A (en) | 1979-11-13 | 1980-11-07 | Thin film sensor |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5693001A (it) |
| DE (1) | DE3041952A1 (it) |
| FR (1) | FR2469802A1 (it) |
| GB (1) | GB2063562A (it) |
| IT (1) | IT1142188B (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001595A (en) * | 1989-04-01 | 1991-03-19 | Gerhard Dittrich | Capacitive pressure sensor and method of manufacturing same |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283641A (ja) * | 1985-10-08 | 1987-04-17 | Sharp Corp | 電界効果型半導体センサ |
| JPS6281004U (it) * | 1985-11-08 | 1987-05-23 | ||
| JP2657318B2 (ja) * | 1989-05-31 | 1997-09-24 | 本田技研工業株式会社 | 耐熱性歪ゲージ及び歪測定方法 |
| DE4024128A1 (de) * | 1990-07-30 | 1992-02-13 | Hottinger Messtechnik Baldwin | Verfahren zum herstellen und applizieren eines dehnungsmessstreifens |
| CN105424096B (zh) * | 2016-01-04 | 2017-07-28 | 东南大学 | 一种阻性复合传感器阵列的读出电路及其读出方法 |
| CN115876071B (zh) * | 2023-03-08 | 2023-05-12 | 中北大学 | 一种镂空型四电阻栅式薄膜应变传感器及其制备方法 |
-
1980
- 1980-11-06 DE DE19803041952 patent/DE3041952A1/de not_active Withdrawn
- 1980-11-07 GB GB8035793A patent/GB2063562A/en not_active Withdrawn
- 1980-11-12 FR FR8024019A patent/FR2469802A1/fr active Pending
- 1980-11-13 JP JP15894080A patent/JPS5693001A/ja active Pending
- 1980-11-13 IT IT50160/80A patent/IT1142188B/it active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001595A (en) * | 1989-04-01 | 1991-03-19 | Gerhard Dittrich | Capacitive pressure sensor and method of manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2469802A1 (fr) | 1981-05-22 |
| JPS5693001A (en) | 1981-07-28 |
| IT8050160A0 (it) | 1980-11-13 |
| IT1142188B (it) | 1986-10-08 |
| DE3041952A1 (de) | 1981-09-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |