IT1142188B - Procedimento per produrre una struttura di sensore a pellicola sottile - Google Patents

Procedimento per produrre una struttura di sensore a pellicola sottile

Info

Publication number
IT1142188B
IT1142188B IT50160/80A IT5016080A IT1142188B IT 1142188 B IT1142188 B IT 1142188B IT 50160/80 A IT50160/80 A IT 50160/80A IT 5016080 A IT5016080 A IT 5016080A IT 1142188 B IT1142188 B IT 1142188B
Authority
IT
Italy
Prior art keywords
procedure
producing
thin film
sensor structure
film sensor
Prior art date
Application number
IT50160/80A
Other languages
English (en)
Other versions
IT8050160A0 (it
Inventor
Donald J Koneval
Original Assignee
Gould Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gould Inc filed Critical Gould Inc
Publication of IT8050160A0 publication Critical patent/IT8050160A0/it
Application granted granted Critical
Publication of IT1142188B publication Critical patent/IT1142188B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
IT50160/80A 1979-11-13 1980-11-13 Procedimento per produrre una struttura di sensore a pellicola sottile IT1142188B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9383479A 1979-11-13 1979-11-13

Publications (2)

Publication Number Publication Date
IT8050160A0 IT8050160A0 (it) 1980-11-13
IT1142188B true IT1142188B (it) 1986-10-08

Family

ID=22241068

Family Applications (1)

Application Number Title Priority Date Filing Date
IT50160/80A IT1142188B (it) 1979-11-13 1980-11-13 Procedimento per produrre una struttura di sensore a pellicola sottile

Country Status (5)

Country Link
JP (1) JPS5693001A (it)
DE (1) DE3041952A1 (it)
FR (1) FR2469802A1 (it)
GB (1) GB2063562A (it)
IT (1) IT1142188B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283641A (ja) * 1985-10-08 1987-04-17 Sharp Corp 電界効果型半導体センサ
JPS6281004U (it) * 1985-11-08 1987-05-23
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
JP2657318B2 (ja) * 1989-05-31 1997-09-24 本田技研工業株式会社 耐熱性歪ゲージ及び歪測定方法
DE4024128A1 (de) * 1990-07-30 1992-02-13 Hottinger Messtechnik Baldwin Verfahren zum herstellen und applizieren eines dehnungsmessstreifens
CN105424096B (zh) * 2016-01-04 2017-07-28 东南大学 一种阻性复合传感器阵列的读出电路及其读出方法
CN115876071B (zh) * 2023-03-08 2023-05-12 中北大学 一种镂空型四电阻栅式薄膜应变传感器及其制备方法

Also Published As

Publication number Publication date
JPS5693001A (en) 1981-07-28
GB2063562A (en) 1981-06-03
DE3041952A1 (de) 1981-09-03
FR2469802A1 (fr) 1981-05-22
IT8050160A0 (it) 1980-11-13

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