FR2469802A1 - Procede de fabrication d'un capteur a couches minces - Google Patents

Procede de fabrication d'un capteur a couches minces

Info

Publication number
FR2469802A1
FR2469802A1 FR8024019A FR8024019A FR2469802A1 FR 2469802 A1 FR2469802 A1 FR 2469802A1 FR 8024019 A FR8024019 A FR 8024019A FR 8024019 A FR8024019 A FR 8024019A FR 2469802 A1 FR2469802 A1 FR 2469802A1
Authority
FR
France
Prior art keywords
layer
manufacturing
thin film
film sensor
forged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8024019A
Other languages
English (en)
Inventor
Donald J Koneval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gould Inc
Original Assignee
Gould Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gould Inc filed Critical Gould Inc
Publication of FR2469802A1 publication Critical patent/FR2469802A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PROCEDE DE FABRICATION D'UN CAPTEUR 10 A COUCHES MINCES DANS LEQUEL ON DEPOSE TOUT D'ABORD SUR UN SUPPORT 11 UNE STRUCTURE MULTICOUCHES QUI PEUT COMPRENDRE UNE COUCHE INFERIEURE ISOLANTE 13, UNE COUCHE RESISTANTE ET UNE COUCHE CONDUCTRICE SUPERPOSEES. ON PEUT ENLEVER DES PARTIES DESDITES COUCHES PAR DES PROCEDES LITHOGRAPHIQUES APPROPRIES POUR FORMER UNE STRUCTURE RESISTANTE AYANT UNE SURFACE DE CONNEXION 20. UNE COUCHE EXTERNE PROTECTRICE 18 PEUT ETRE FORMEE SUR LA STRUCTURE RESISTANTE ET DES FENETRES 19 PEUVENT ENSUITE ETRE FORMEES DANS CETTE COUCHE 18 POUR OUVRIR ACCES A LA SURFACE 20 DE CONNEXION. LES FENETRES 19 SONT FORMEES PAR DES PROCEDES PHOTOLITHOGRAPHIQUES DANS UNE PHASE FINALE D'ENLEVEMENT.
FR8024019A 1979-11-13 1980-11-12 Procede de fabrication d'un capteur a couches minces Pending FR2469802A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9383479A 1979-11-13 1979-11-13

Publications (1)

Publication Number Publication Date
FR2469802A1 true FR2469802A1 (fr) 1981-05-22

Family

ID=22241068

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8024019A Pending FR2469802A1 (fr) 1979-11-13 1980-11-12 Procede de fabrication d'un capteur a couches minces

Country Status (5)

Country Link
JP (1) JPS5693001A (fr)
DE (1) DE3041952A1 (fr)
FR (1) FR2469802A1 (fr)
GB (1) GB2063562A (fr)
IT (1) IT1142188B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283641A (ja) * 1985-10-08 1987-04-17 Sharp Corp 電界効果型半導体センサ
JPS6281004U (fr) * 1985-11-08 1987-05-23
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
JP2657318B2 (ja) * 1989-05-31 1997-09-24 本田技研工業株式会社 耐熱性歪ゲージ及び歪測定方法
DE4024128A1 (de) * 1990-07-30 1992-02-13 Hottinger Messtechnik Baldwin Verfahren zum herstellen und applizieren eines dehnungsmessstreifens
CN105424096B (zh) * 2016-01-04 2017-07-28 东南大学 一种阻性复合传感器阵列的读出电路及其读出方法
CN115876071B (zh) * 2023-03-08 2023-05-12 中北大学 一种镂空型四电阻栅式薄膜应变传感器及其制备方法

Also Published As

Publication number Publication date
IT8050160A0 (it) 1980-11-13
IT1142188B (it) 1986-10-08
DE3041952A1 (de) 1981-09-03
JPS5693001A (en) 1981-07-28
GB2063562A (en) 1981-06-03

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