JPS5693001A - Method of forming thinnfilm sensor - Google Patents
Method of forming thinnfilm sensorInfo
- Publication number
- JPS5693001A JPS5693001A JP15894080A JP15894080A JPS5693001A JP S5693001 A JPS5693001 A JP S5693001A JP 15894080 A JP15894080 A JP 15894080A JP 15894080 A JP15894080 A JP 15894080A JP S5693001 A JPS5693001 A JP S5693001A
- Authority
- JP
- Japan
- Prior art keywords
- thinnfilm
- sensor
- forming
- thinnfilm sensor
- forming thinnfilm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9383479A | 1979-11-13 | 1979-11-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5693001A true JPS5693001A (en) | 1981-07-28 |
Family
ID=22241068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15894080A Pending JPS5693001A (en) | 1979-11-13 | 1980-11-13 | Method of forming thinnfilm sensor |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5693001A (en) |
DE (1) | DE3041952A1 (en) |
FR (1) | FR2469802A1 (en) |
GB (1) | GB2063562A (en) |
IT (1) | IT1142188B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH032603A (en) * | 1989-05-31 | 1991-01-09 | Honda Motor Co Ltd | Heat resisting strain gage and strain measuring method |
CN105424096A (en) * | 2016-01-04 | 2016-03-23 | 东南大学 | Readout circuit of resistive composite sensor array, and readout method thereof |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6283641A (en) * | 1985-10-08 | 1987-04-17 | Sharp Corp | Sensor element |
JPS6281004U (en) * | 1985-11-08 | 1987-05-23 | ||
DE3910646A1 (en) * | 1989-04-01 | 1990-10-04 | Endress Hauser Gmbh Co | CAPACITIVE PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF |
DE4024128A1 (en) * | 1990-07-30 | 1992-02-13 | Hottinger Messtechnik Baldwin | METHOD FOR PRODUCING AND APPLYING A STRETCH MEASURING STRIP |
CN115876071B (en) * | 2023-03-08 | 2023-05-12 | 中北大学 | Hollowed-out four-resistance grid type thin film strain sensor and preparation method thereof |
-
1980
- 1980-11-06 DE DE19803041952 patent/DE3041952A1/en not_active Withdrawn
- 1980-11-07 GB GB8035793A patent/GB2063562A/en not_active Withdrawn
- 1980-11-12 FR FR8024019A patent/FR2469802A1/en active Pending
- 1980-11-13 JP JP15894080A patent/JPS5693001A/en active Pending
- 1980-11-13 IT IT50160/80A patent/IT1142188B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH032603A (en) * | 1989-05-31 | 1991-01-09 | Honda Motor Co Ltd | Heat resisting strain gage and strain measuring method |
CN105424096A (en) * | 2016-01-04 | 2016-03-23 | 东南大学 | Readout circuit of resistive composite sensor array, and readout method thereof |
Also Published As
Publication number | Publication date |
---|---|
IT8050160A0 (en) | 1980-11-13 |
FR2469802A1 (en) | 1981-05-22 |
IT1142188B (en) | 1986-10-08 |
DE3041952A1 (en) | 1981-09-03 |
GB2063562A (en) | 1981-06-03 |
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