GB1530509A - Installation for producing electrolytically microscopic passages in a semiconductor body in particular microscopic passages for electronmultiplication applications and operating process of the same - Google Patents

Installation for producing electrolytically microscopic passages in a semiconductor body in particular microscopic passages for electronmultiplication applications and operating process of the same

Info

Publication number
GB1530509A
GB1530509A GB2642276A GB2642276A GB1530509A GB 1530509 A GB1530509 A GB 1530509A GB 2642276 A GB2642276 A GB 2642276A GB 2642276 A GB2642276 A GB 2642276A GB 1530509 A GB1530509 A GB 1530509A
Authority
GB
United Kingdom
Prior art keywords
passages
holes
semi
electrolyte
microscopic passages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2642276A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1530509A publication Critical patent/GB1530509A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
GB2642276A 1975-06-27 1976-06-24 Installation for producing electrolytically microscopic passages in a semiconductor body in particular microscopic passages for electronmultiplication applications and operating process of the same Expired GB1530509A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7520398A FR2315763A1 (fr) 1975-06-27 1975-06-27 Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons

Publications (1)

Publication Number Publication Date
GB1530509A true GB1530509A (en) 1978-11-01

Family

ID=9157238

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2642276A Expired GB1530509A (en) 1975-06-27 1976-06-24 Installation for producing electrolytically microscopic passages in a semiconductor body in particular microscopic passages for electronmultiplication applications and operating process of the same

Country Status (4)

Country Link
JP (1) JPS524785A (enrdf_load_stackoverflow)
DE (1) DE2628381B2 (enrdf_load_stackoverflow)
FR (1) FR2315763A1 (enrdf_load_stackoverflow)
GB (1) GB1530509A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6387247B1 (en) 1999-09-03 2002-05-14 Shell Oil Company Feed injection system for catalytic cracking process
WO2002075800A1 (fr) * 2001-03-19 2002-09-26 Mitsubishi Denki Kabushiki Kaisha Procede et appareil de gravure electrochimique, et produit obtenu par gravure electrochimique
US7749868B2 (en) 2005-05-18 2010-07-06 Panasonic Electric Works Co., Ltd. Process of forming a curved profile on a semiconductor substrate
US8313632B2 (en) 2005-05-18 2012-11-20 Panasonic Corporation Process of making an optical lens

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488772A (en) * 1977-12-26 1979-07-14 Nec Corp Local etching method for semiconductor device
JPS5513960A (en) * 1978-07-17 1980-01-31 Nec Corp Mesa forming method
JP4743102B2 (ja) * 2005-05-18 2011-08-10 パナソニック電工株式会社 曲面の形成方法
JP4862642B2 (ja) * 2005-05-18 2012-01-25 パナソニック電工株式会社 曲面の形成方法
JP4586798B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586797B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586796B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4862407B2 (ja) * 2006-01-26 2012-01-25 パナソニック電工株式会社 半導体レンズの製造方法
JP5010253B2 (ja) * 2006-03-28 2012-08-29 パナソニック株式会社 半導体レンズおよびそれを用いた赤外線検出装置、半導体レンズの製造方法
JP5010252B2 (ja) * 2006-11-27 2012-08-29 パナソニック株式会社 半導体レンズの製造方法
JP5427062B2 (ja) * 2010-02-25 2014-02-26 東京エレクトロン株式会社 基板のエッチング方法、プログラム及びコンピュータ記憶媒体

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6387247B1 (en) 1999-09-03 2002-05-14 Shell Oil Company Feed injection system for catalytic cracking process
WO2002075800A1 (fr) * 2001-03-19 2002-09-26 Mitsubishi Denki Kabushiki Kaisha Procede et appareil de gravure electrochimique, et produit obtenu par gravure electrochimique
US7749868B2 (en) 2005-05-18 2010-07-06 Panasonic Electric Works Co., Ltd. Process of forming a curved profile on a semiconductor substrate
US8313632B2 (en) 2005-05-18 2012-11-20 Panasonic Corporation Process of making an optical lens

Also Published As

Publication number Publication date
DE2628381A1 (de) 1976-12-30
FR2315763A1 (fr) 1977-01-21
JPS524785A (en) 1977-01-14
DE2628381C3 (enrdf_load_stackoverflow) 1979-07-12
FR2315763B1 (enrdf_load_stackoverflow) 1979-02-02
DE2628381B2 (de) 1978-11-16

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee