FR2315763A1 - Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons - Google Patents

Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons

Info

Publication number
FR2315763A1
FR2315763A1 FR7520398A FR7520398A FR2315763A1 FR 2315763 A1 FR2315763 A1 FR 2315763A1 FR 7520398 A FR7520398 A FR 7520398A FR 7520398 A FR7520398 A FR 7520398A FR 2315763 A1 FR2315763 A1 FR 2315763A1
Authority
FR
France
Prior art keywords
micro
channels
semiconductor body
electron multiplier
particular electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7520398A
Other languages
English (en)
Other versions
FR2315763B1 (fr
Inventor
Christian Baud
Yvan Raverdy
Henri Rougeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7520398A priority Critical patent/FR2315763A1/fr
Priority to DE19762628381 priority patent/DE2628381B2/de
Priority to GB2642276A priority patent/GB1530509A/en
Priority to JP7630576A priority patent/JPS524785A/ja
Publication of FR2315763A1 publication Critical patent/FR2315763A1/fr
Application granted granted Critical
Publication of FR2315763B1 publication Critical patent/FR2315763B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes
FR7520398A 1975-06-27 1975-06-27 Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons Granted FR2315763A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7520398A FR2315763A1 (fr) 1975-06-27 1975-06-27 Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons
DE19762628381 DE2628381B2 (de) 1975-06-27 1976-06-24 Vorrichtung zum Bohren von Mikrokanälen zwischen zwei einander gegenüberliegenden Flächen eines n-leitenden Halbleiterkörpers
GB2642276A GB1530509A (en) 1975-06-27 1976-06-24 Installation for producing electrolytically microscopic passages in a semiconductor body in particular microscopic passages for electronmultiplication applications and operating process of the same
JP7630576A JPS524785A (en) 1975-06-27 1976-06-28 Apparatus making fine holes between opposing two faces of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7520398A FR2315763A1 (fr) 1975-06-27 1975-06-27 Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons

Publications (2)

Publication Number Publication Date
FR2315763A1 true FR2315763A1 (fr) 1977-01-21
FR2315763B1 FR2315763B1 (fr) 1979-02-02

Family

ID=9157238

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7520398A Granted FR2315763A1 (fr) 1975-06-27 1975-06-27 Installation de realisation de micro-canaux dans un corps semi-conducteur, en particulier de micro-canaux multiplicateurs d'electrons

Country Status (4)

Country Link
JP (1) JPS524785A (fr)
DE (1) DE2628381B2 (fr)
FR (1) FR2315763A1 (fr)
GB (1) GB1530509A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488772A (en) * 1977-12-26 1979-07-14 Nec Corp Local etching method for semiconductor device
JPS5513960A (en) * 1978-07-17 1980-01-31 Nec Corp Mesa forming method
US6387247B1 (en) 1999-09-03 2002-05-14 Shell Oil Company Feed injection system for catalytic cracking process
JPWO2002075800A1 (ja) * 2001-03-19 2004-07-08 三菱電機株式会社 電気化学エッチング装置及びその方法並びにその製造物
JP4862642B2 (ja) * 2005-05-18 2012-01-25 パナソニック電工株式会社 曲面の形成方法
US7749868B2 (en) 2005-05-18 2010-07-06 Panasonic Electric Works Co., Ltd. Process of forming a curved profile on a semiconductor substrate
JP4743102B2 (ja) * 2005-05-18 2011-08-10 パナソニック電工株式会社 曲面の形成方法
KR100947483B1 (ko) 2005-05-18 2010-03-17 파나소닉 전공 주식회사 광학 렌즈의 형성 공정
JP4586796B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586797B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586798B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4862407B2 (ja) * 2006-01-26 2012-01-25 パナソニック電工株式会社 半導体レンズの製造方法
JP5010253B2 (ja) * 2006-03-28 2012-08-29 パナソニック株式会社 半導体レンズおよびそれを用いた赤外線検出装置、半導体レンズの製造方法
JP5010252B2 (ja) * 2006-11-27 2012-08-29 パナソニック株式会社 半導体レンズの製造方法
JP5427062B2 (ja) * 2010-02-25 2014-02-26 東京エレクトロン株式会社 基板のエッチング方法、プログラム及びコンピュータ記憶媒体

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
GB1530509A (en) 1978-11-01
DE2628381B2 (de) 1978-11-16
FR2315763B1 (fr) 1979-02-02
DE2628381A1 (de) 1976-12-30
DE2628381C3 (fr) 1979-07-12
JPS524785A (en) 1977-01-14

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Legal Events

Date Code Title Description
ST Notification of lapse