GB1526425A - Method of etching aluminium oxide - Google Patents

Method of etching aluminium oxide

Info

Publication number
GB1526425A
GB1526425A GB42222/75A GB4222275A GB1526425A GB 1526425 A GB1526425 A GB 1526425A GB 42222/75 A GB42222/75 A GB 42222/75A GB 4222275 A GB4222275 A GB 4222275A GB 1526425 A GB1526425 A GB 1526425A
Authority
GB
United Kingdom
Prior art keywords
layer
mask
fluoride
etching
oct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42222/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7435151A external-priority patent/FR2288392A1/fr
Priority claimed from FR7435152A external-priority patent/FR2288138A1/fr
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1526425A publication Critical patent/GB1526425A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6314—Formation by oxidation, e.g. oxidation of the substrate of a metallic layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • ing And Chemical Polishing (AREA)
GB42222/75A 1974-10-18 1975-10-15 Method of etching aluminium oxide Expired GB1526425A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7435151A FR2288392A1 (fr) 1974-10-18 1974-10-18 Procede de realisation de dispositifs semiconducteurs
FR7435152A FR2288138A1 (fr) 1974-10-18 1974-10-18 Procede d'attaque de l'alumine

Publications (1)

Publication Number Publication Date
GB1526425A true GB1526425A (en) 1978-09-27

Family

ID=26218562

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42222/75A Expired GB1526425A (en) 1974-10-18 1975-10-15 Method of etching aluminium oxide

Country Status (4)

Country Link
JP (1) JPS5640492B2 (enExample)
BR (1) BR7506737A (enExample)
DE (1) DE2546316C2 (enExample)
GB (1) GB1526425A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3048083C2 (de) * 1980-12-19 1983-09-29 Ludwig 8900 Augsburg Fahrmbacher-Lutz Verfahren zur chemischen Entfernung von Oxidschichten von Gegenständen aus Titan oder Titanlegierungen
JPS59184532A (ja) * 1983-04-05 1984-10-19 Oki Electric Ind Co Ltd 半導体装置の製造方法
WO1999046811A1 (de) * 1998-03-10 1999-09-16 Scacco Electronics Consulting Selektives ätzen von siliciumnitrid mit einem nasschemischen ver fahren
WO2019151090A1 (ja) * 2018-01-30 2019-08-08 東京エレクトロン株式会社 基板処理方法、基板処理装置およびエッチング液

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2828193A (en) * 1954-08-09 1958-03-25 Turco Products Inc Method for rejuvenation of aluminum treating solutions
JPS5141161B2 (enExample) * 1972-08-25 1976-11-08

Also Published As

Publication number Publication date
DE2546316A1 (de) 1976-04-22
BR7506737A (pt) 1976-08-17
DE2546316C2 (de) 1982-11-11
JPS5169369A (enExample) 1976-06-15
JPS5640492B2 (enExample) 1981-09-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee