GB1504984A - Micro-chamber for electron optical examinations - Google Patents

Micro-chamber for electron optical examinations

Info

Publication number
GB1504984A
GB1504984A GB1101575A GB1101575A GB1504984A GB 1504984 A GB1504984 A GB 1504984A GB 1101575 A GB1101575 A GB 1101575A GB 1101575 A GB1101575 A GB 1101575A GB 1504984 A GB1504984 A GB 1504984A
Authority
GB
United Kingdom
Prior art keywords
specimen
chamber
holder
casing
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1101575A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NOVEX FOREIGN TRADE CO Ltd
Original Assignee
NOVEX FOREIGN TRADE CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NOVEX FOREIGN TRADE CO Ltd filed Critical NOVEX FOREIGN TRADE CO Ltd
Publication of GB1504984A publication Critical patent/GB1504984A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB1101575A 1974-03-28 1975-03-17 Micro-chamber for electron optical examinations Expired GB1504984A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HUMA002555 HU168264B (de) 1974-03-28 1974-03-28

Publications (1)

Publication Number Publication Date
GB1504984A true GB1504984A (en) 1978-03-22

Family

ID=10998701

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1101575A Expired GB1504984A (en) 1974-03-28 1975-03-17 Micro-chamber for electron optical examinations

Country Status (6)

Country Link
JP (1) JPS50141968A (de)
DE (1) DE2513832C2 (de)
FR (1) FR2266299B3 (de)
GB (1) GB1504984A (de)
HU (1) HU168264B (de)
NL (1) NL7503645A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1509941A2 (de) * 2002-06-05 2005-03-02 YEDA RESEARCH AND DEVELOPMENT Co. LTD. Niederdruckkammer für die rasterelektronenmikroskopie in einer nassen umgebung
EP1722394A2 (de) * 2005-05-09 2006-11-15 Lee, Bing-Huan Verfahren zur Handhabung von Flüssigkeit in einer Vakuum oder Niederdruck- Umgebung und zur Überwachung des Betriebs und Vorrichtung für den Betrieb und die Überwachung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794471B2 (ja) * 1989-11-24 1998-09-03 日本電子テクニクス株式会社 電子顕微鏡
DE10256718B4 (de) * 2002-12-04 2004-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Probenuntersuchung mittels eines atmosphärischen oder druckvariablen Rasterelektronenmikroskops
JP6364167B2 (ja) * 2013-09-30 2018-07-25 株式会社日立ハイテクノロジーズ 環境制御型荷電粒子観察システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE911409C (de) * 1942-04-29 1954-05-13 Siemens Ag Korpuskularstrahlapparat, insbesondere Elektronenmikroskop

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1509941A2 (de) * 2002-06-05 2005-03-02 YEDA RESEARCH AND DEVELOPMENT Co. LTD. Niederdruckkammer für die rasterelektronenmikroskopie in einer nassen umgebung
EP1509941A4 (de) * 2002-06-05 2007-12-12 Yeda Res & Dev Niederdruckkammer für die rasterelektronenmikroskopie in einer nassen umgebung
EP1722394A2 (de) * 2005-05-09 2006-11-15 Lee, Bing-Huan Verfahren zur Handhabung von Flüssigkeit in einer Vakuum oder Niederdruck- Umgebung und zur Überwachung des Betriebs und Vorrichtung für den Betrieb und die Überwachung
EP1722394A3 (de) * 2005-05-09 2008-02-13 Contrel Technology Co., Ltd. Verfahren zur Handhabung von Flüssigkeit in einer Vakuum oder Niederdruck- Umgebung und zur Überwachung des Betriebs und Vorrichtung für den Betrieb und die Überwachung

Also Published As

Publication number Publication date
JPS50141968A (de) 1975-11-15
FR2266299A1 (de) 1975-10-24
FR2266299B3 (de) 1977-07-01
DE2513832C2 (de) 1981-10-08
DE2513832A1 (de) 1975-10-02
NL7503645A (nl) 1975-09-30
HU168264B (de) 1976-03-28

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee