GB1391336A - Apparatus for a scanning electron microscope and method of use - Google Patents

Apparatus for a scanning electron microscope and method of use

Info

Publication number
GB1391336A
GB1391336A GB1190472A GB1190472A GB1391336A GB 1391336 A GB1391336 A GB 1391336A GB 1190472 A GB1190472 A GB 1190472A GB 1190472 A GB1190472 A GB 1190472A GB 1391336 A GB1391336 A GB 1391336A
Authority
GB
United Kingdom
Prior art keywords
specimen
chamber
frost
holder
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1190472A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1757871U external-priority patent/JPS5120680Y2/ja
Priority claimed from JP10057771U external-priority patent/JPS5127716Y2/ja
Priority claimed from JP8740871A external-priority patent/JPS5116252B2/ja
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1391336A publication Critical patent/GB1391336A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Abstract

1391336 Electron microscopes NIHON DENSHI KK 14 March 1972 [16 March 1971] 11904/72 Heading H1D A scanning electron microscope is provided with an auxiliary evacuated chamber in which the specimen may be kept cool prior to insertion in the microscope. The specimen may be fixed on a holder which is plunged into a bath of liquid nitrogen and covered whilst still submerged; when the holder is placed in the auxiliary chamber the cover may be removed and the holder rested on a support cooled by thermal conduction to a nitrogen bath. The chamber may be provided with a knife for cutting the specimen, and the knife may be cooled by heat conduction along a wire belt (Fig. 4, not shown). Alternatively the chamber may incorporate an infra-red lamp which can de-frost a selected area of the specimen (Fig. 6, not shown). A microscope may be provided for observing these operations (Figs. 4 and 6, not shown). A heating coil may be provided to de-frost a whole area of the specimen surface. To prevent the occurrence of frost in the chamber it may be filled with dry gas prior to insertion and removal of specimens (Fig. 7, not shown).
GB1190472A 1971-03-16 1972-03-14 Apparatus for a scanning electron microscope and method of use Expired GB1391336A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1757871U JPS5120680Y2 (en) 1971-03-16 1971-03-16
JP10057771U JPS5127716Y2 (en) 1971-10-29 1971-10-29
JP8740871A JPS5116252B2 (en) 1971-11-02 1971-11-02

Publications (1)

Publication Number Publication Date
GB1391336A true GB1391336A (en) 1975-04-23

Family

ID=27281891

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1190472A Expired GB1391336A (en) 1971-03-16 1972-03-14 Apparatus for a scanning electron microscope and method of use

Country Status (4)

Country Link
US (1) US3761709A (en)
DE (1) DE2211423C3 (en)
FR (1) FR2130141B1 (en)
GB (1) GB1391336A (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus
US3858049A (en) * 1973-09-17 1974-12-31 Etec Corp Method and apparatus for sem specimen coating and transfer
US3885158A (en) * 1973-10-23 1975-05-20 Harris Corp Specimen block and specimen block holder
US3980885A (en) * 1974-09-06 1976-09-14 Vincent William Steward Diagnosis by proton bombardment
US3984683A (en) * 1975-05-27 1976-10-05 Rca Corporation Apparatus and method for analyzing biological cells for malignancy
JPS5478076A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Frozen sample observation device of scanning electron microscope and similar unit
DE2906153C2 (en) * 1979-02-17 1984-10-31 C. Reichert Optische Werke Ag, Wien Cooling chamber for holding objects to be processed, in particular biological objects
JPS56121151U (en) * 1980-02-15 1981-09-16
JPS6285840A (en) * 1985-10-11 1987-04-20 Kureha Chem Ind Co Ltd Method and device for sample processing using scanning type electron microscope
JPH0668962B2 (en) * 1987-12-21 1994-08-31 株式会社東芝 Vacuum device and method of performing process using the same
US4916314A (en) * 1988-09-23 1990-04-10 Amoco Corporation Method and apparatus for analyzing components of selected fluid inclusions
JPH0374036A (en) * 1989-08-11 1991-03-28 Jeol Ltd Sample replacing device for electron microscope
DE4041029C1 (en) * 1990-12-20 1992-02-06 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
WO1998028776A2 (en) * 1996-12-23 1998-07-02 Koninklijke Philips Electronics N.V. Particle-optical apparatus including a low-temperature specimen holder
NL1021376C1 (en) * 2002-09-02 2004-03-03 Fei Co Method for obtaining a particle-optical image of a sample in a particle-optical device.
CN101461026B (en) * 2006-06-07 2012-01-18 Fei公司 Slider bearing for use with an apparatus comprising a vacuum chamber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2417213A (en) * 1944-12-28 1947-03-11 Rca Corp Device for indirect heating of materials
US2826701A (en) * 1954-09-01 1958-03-11 Gen Electric Low temperature chamber for electronoptics instruments
FR1520418A (en) * 1965-11-25 1968-04-12 Balzers Patent Beteilig Ag Electronic emission microscope
US3483373A (en) * 1966-07-28 1969-12-09 Siemens Ag Airlock assembly for corpuscular ray devices
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope

Also Published As

Publication number Publication date
US3761709A (en) 1973-09-25
FR2130141A1 (en) 1972-11-03
DE2211423C3 (en) 1979-11-08
DE2211423A1 (en) 1972-09-21
DE2211423B2 (en) 1979-03-15
FR2130141B1 (en) 1976-06-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee