FR2266299B3 - - Google Patents
Info
- Publication number
- FR2266299B3 FR2266299B3 FR7509487A FR7509487A FR2266299B3 FR 2266299 B3 FR2266299 B3 FR 2266299B3 FR 7509487 A FR7509487 A FR 7509487A FR 7509487 A FR7509487 A FR 7509487A FR 2266299 B3 FR2266299 B3 FR 2266299B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HUMA002555 HU168264B (de) | 1974-03-28 | 1974-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2266299A1 FR2266299A1 (de) | 1975-10-24 |
| FR2266299B3 true FR2266299B3 (de) | 1977-07-01 |
Family
ID=10998701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7509487A Expired FR2266299B3 (de) | 1974-03-28 | 1975-03-26 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS50141968A (de) |
| DE (1) | DE2513832C2 (de) |
| FR (1) | FR2266299B3 (de) |
| GB (1) | GB1504984A (de) |
| HU (1) | HU168264B (de) |
| NL (1) | NL7503645A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2794471B2 (ja) * | 1989-11-24 | 1998-09-03 | 日本電子テクニクス株式会社 | 電子顕微鏡 |
| IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
| DE10256718B4 (de) * | 2002-12-04 | 2004-10-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Probenuntersuchung mittels eines atmosphärischen oder druckvariablen Rasterelektronenmikroskops |
| CN1862250A (zh) * | 2005-05-09 | 2006-11-15 | 李炳寰 | 在真空或低压环境中操作液体且可供观测的方法及装置 |
| JP6364167B2 (ja) * | 2013-09-30 | 2018-07-25 | 株式会社日立ハイテクノロジーズ | 環境制御型荷電粒子観察システム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE911409C (de) * | 1942-04-29 | 1954-05-13 | Siemens Ag | Korpuskularstrahlapparat, insbesondere Elektronenmikroskop |
-
1974
- 1974-03-28 HU HUMA002555 patent/HU168264B/hu unknown
-
1975
- 1975-03-17 GB GB1101575A patent/GB1504984A/en not_active Expired
- 1975-03-26 NL NL7503645A patent/NL7503645A/xx not_active Application Discontinuation
- 1975-03-26 FR FR7509487A patent/FR2266299B3/fr not_active Expired
- 1975-03-27 DE DE19752513832 patent/DE2513832C2/de not_active Expired
- 1975-03-28 JP JP3771775A patent/JPS50141968A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2513832A1 (de) | 1975-10-02 |
| HU168264B (de) | 1976-03-28 |
| JPS50141968A (de) | 1975-11-15 |
| GB1504984A (en) | 1978-03-22 |
| DE2513832C2 (de) | 1981-10-08 |
| NL7503645A (nl) | 1975-09-30 |
| FR2266299A1 (de) | 1975-10-24 |