GB1490496A - Raster scanning ion microscope with quadrupole mass filte - Google Patents

Raster scanning ion microscope with quadrupole mass filte

Info

Publication number
GB1490496A
GB1490496A GB18755/76A GB1875576A GB1490496A GB 1490496 A GB1490496 A GB 1490496A GB 18755/76 A GB18755/76 A GB 18755/76A GB 1875576 A GB1875576 A GB 1875576A GB 1490496 A GB1490496 A GB 1490496A
Authority
GB
United Kingdom
Prior art keywords
filte
ion microscope
quadrupole mass
scanning ion
raster scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB18755/76A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STRAHLEN UMWELTFORSCH GmbH
Original Assignee
STRAHLEN UMWELTFORSCH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STRAHLEN UMWELTFORSCH GmbH filed Critical STRAHLEN UMWELTFORSCH GmbH
Publication of GB1490496A publication Critical patent/GB1490496A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB18755/76A 1975-12-13 1976-05-07 Raster scanning ion microscope with quadrupole mass filte Expired GB1490496A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2556291A DE2556291C3 (de) 1975-12-13 1975-12-13 Raster-Ionenmikroskop

Publications (1)

Publication Number Publication Date
GB1490496A true GB1490496A (en) 1977-11-02

Family

ID=5964353

Family Applications (1)

Application Number Title Priority Date Filing Date
GB18755/76A Expired GB1490496A (en) 1975-12-13 1976-05-07 Raster scanning ion microscope with quadrupole mass filte

Country Status (4)

Country Link
US (1) US4132892A (enExample)
DE (1) DE2556291C3 (enExample)
FR (1) FR2335038A1 (enExample)
GB (1) GB1490496A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950330C2 (de) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur chemischen Analyse von Proben
US4315153A (en) * 1980-05-19 1982-02-09 Hughes Aircraft Company Focusing ExB mass separator for space-charge dominated ion beams
JPS6197557A (ja) * 1984-10-19 1986-05-16 Kawasaki Steel Corp 二次イオン質量分析装置
US4661702A (en) * 1984-10-24 1987-04-28 The Perkin-Elmer Corporation Primary ion beam raster gating technique for secondary ion mass spectrometer system
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
US4556794A (en) * 1985-01-30 1985-12-03 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
US4829179A (en) * 1986-07-12 1989-05-09 Nissin Electric Company, Limited Surface analyzer
US4785173A (en) * 1987-03-09 1988-11-15 Anelva Corporation Element analyzing apparatus
US4800273A (en) * 1988-01-07 1989-01-24 Phillips Bradway F Secondary ion mass spectrometer
US4968888A (en) * 1989-07-05 1990-11-06 The United States Of America As Represented By The United States Department Of Energy Pulsed field sample neutralization
JP3260663B2 (ja) * 1997-07-23 2002-02-25 沖電気工業株式会社 ホール内表面の組成分布検出方法
US6153880A (en) * 1999-09-30 2000-11-28 Agilent Technologies, Inc. Method and apparatus for performance improvement of mass spectrometers using dynamic ion optics
GB2386747A (en) * 2001-11-08 2003-09-24 Ionoptika Ltd Fullerene ion gun
DE102004030523A1 (de) * 2004-06-18 2006-01-12 Siemens Ag Transportsystem für Nanopartikel und Verfahren zu dessen Betrieb
EP2027594B1 (en) * 2005-07-08 2011-12-14 NexGen Semi Holding, Inc. Apparatus and method for controlled particle beam manufacturing of semiconductors
WO2008140585A1 (en) 2006-11-22 2008-11-20 Nexgen Semi Holding, Inc. Apparatus and method for conformal mask manufacturing
US10991545B2 (en) 2008-06-30 2021-04-27 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US9245722B2 (en) * 2013-09-16 2016-01-26 Georgia Tech Research Corporation SMS probe and SEM imaging system and methods of use
US12493005B1 (en) 2022-06-07 2025-12-09 Nexgen Semi Holding, Inc. Extended range active illumination imager

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (enExample) * 1969-05-16 1975-11-08
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
DE2255302C3 (de) * 1972-11-11 1980-09-11 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung für die Sekundär-Ionen-Massenspektroskopie
JPS5015594A (enExample) * 1973-06-08 1975-02-19
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
DE2414221C3 (de) * 1974-03-25 1979-01-18 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Also Published As

Publication number Publication date
DE2556291B2 (de) 1980-03-27
DE2556291A1 (de) 1977-06-23
FR2335038A1 (fr) 1977-07-08
DE2556291C3 (de) 1980-11-27
FR2335038B1 (enExample) 1981-09-04
US4132892A (en) 1979-01-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19960506