GB1494118A - Producing charged particles - Google Patents

Producing charged particles

Info

Publication number
GB1494118A
GB1494118A GB4256075A GB4256075A GB1494118A GB 1494118 A GB1494118 A GB 1494118A GB 4256075 A GB4256075 A GB 4256075A GB 4256075 A GB4256075 A GB 4256075A GB 1494118 A GB1494118 A GB 1494118A
Authority
GB
United Kingdom
Prior art keywords
aperture
lens
lens system
electron
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4256075A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1494118A publication Critical patent/GB1494118A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/067Ion lenses, apertures, skimmers

Abstract

1494118 Electron or ion beam apparatus LEYBOLD - HERAEUS - VERWALTUNG GmbH 16 Oct 1975 [20 Dec 1974] 42560/75 Heading H1D A lens system 1 for focusing charged particles includes at least one electrostatic or magnetostatic lens and a diaphragm stop 10 interrupting the direct line of sight along the optical axis 5 of the system and having an aperture 11 not intersected by the optical axis, the arrangement being such that an intermediate image 8 is formed substantially in the aperture 11. As shown, the lens system precedes a quadruple mass analyser 15 and receives ions from a bombardment sample 6. The aperture can be defined by a space between the diaphragm and a cylinder of the lens rather than an aperture in the diaphragm, Figs. 2 and 2a (not shown). In Fig. 4 (not shown) the lens system precedes an electron energy analyser. Fig. 5 (not shown) is an electron gun using such a lens system to focus an electron beam and excluding particles evaporated from the beam. Fig. 6 (not shown) is similar to Fig. 3 but only one lens is used and further focusing is achieved by the quadrupole analyser which receives the intermediate image at its entrance aperture.
GB4256075A 1974-12-20 1975-10-16 Producing charged particles Expired GB1494118A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742460405 DE2460405A1 (en) 1974-12-20 1974-12-20 LENS SYSTEM FOR CHARGED PARTICLES

Publications (1)

Publication Number Publication Date
GB1494118A true GB1494118A (en) 1977-12-07

Family

ID=5933997

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4256075A Expired GB1494118A (en) 1974-12-20 1975-10-16 Producing charged particles

Country Status (3)

Country Link
DE (1) DE2460405A1 (en)
FR (1) FR2295562A1 (en)
GB (1) GB1494118A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9204524D0 (en) * 1992-03-03 1992-04-15 Fisons Plc Mass spectrometer

Also Published As

Publication number Publication date
FR2295562A1 (en) 1976-07-16
DE2460405A1 (en) 1976-06-24
FR2295562B1 (en) 1981-04-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee