FR2335038A1 - Microscope ionique a grille - Google Patents
Microscope ionique a grilleInfo
- Publication number
- FR2335038A1 FR2335038A1 FR7623714A FR7623714A FR2335038A1 FR 2335038 A1 FR2335038 A1 FR 2335038A1 FR 7623714 A FR7623714 A FR 7623714A FR 7623714 A FR7623714 A FR 7623714A FR 2335038 A1 FR2335038 A1 FR 2335038A1
- Authority
- FR
- France
- Prior art keywords
- ion microscope
- grid ion
- grid
- microscope
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2556291A DE2556291C3 (de) | 1975-12-13 | 1975-12-13 | Raster-Ionenmikroskop |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2335038A1 true FR2335038A1 (fr) | 1977-07-08 |
FR2335038B1 FR2335038B1 (fr) | 1981-09-04 |
Family
ID=5964353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7623714A Granted FR2335038A1 (fr) | 1975-12-13 | 1976-08-03 | Microscope ionique a grille |
Country Status (4)
Country | Link |
---|---|
US (1) | US4132892A (fr) |
DE (1) | DE2556291C3 (fr) |
FR (1) | FR2335038A1 (fr) |
GB (1) | GB1490496A (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2950330C2 (de) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zur chemischen Analyse von Proben |
US4315153A (en) * | 1980-05-19 | 1982-02-09 | Hughes Aircraft Company | Focusing ExB mass separator for space-charge dominated ion beams |
JPS6197557A (ja) * | 1984-10-19 | 1986-05-16 | Kawasaki Steel Corp | 二次イオン質量分析装置 |
US4661702A (en) * | 1984-10-24 | 1987-04-28 | The Perkin-Elmer Corporation | Primary ion beam raster gating technique for secondary ion mass spectrometer system |
US4633084A (en) * | 1985-01-16 | 1986-12-30 | The United States Of America As Represented By The United States Department Of Energy | High efficiency direct detection of ions from resonance ionization of sputtered atoms |
US4556794A (en) * | 1985-01-30 | 1985-12-03 | Hughes Aircraft Company | Secondary ion collection and transport system for ion microprobe |
US4829179A (en) * | 1986-07-12 | 1989-05-09 | Nissin Electric Company, Limited | Surface analyzer |
US4785173A (en) * | 1987-03-09 | 1988-11-15 | Anelva Corporation | Element analyzing apparatus |
US4800273A (en) * | 1988-01-07 | 1989-01-24 | Phillips Bradway F | Secondary ion mass spectrometer |
US4968888A (en) * | 1989-07-05 | 1990-11-06 | The United States Of America As Represented By The United States Department Of Energy | Pulsed field sample neutralization |
JP3260663B2 (ja) * | 1997-07-23 | 2002-02-25 | 沖電気工業株式会社 | ホール内表面の組成分布検出方法 |
US6153880A (en) * | 1999-09-30 | 2000-11-28 | Agilent Technologies, Inc. | Method and apparatus for performance improvement of mass spectrometers using dynamic ion optics |
GB2386747A (en) * | 2001-11-08 | 2003-09-24 | Ionoptika Ltd | Fullerene ion gun |
DE102004030523A1 (de) * | 2004-06-18 | 2006-01-12 | Siemens Ag | Transportsystem für Nanopartikel und Verfahren zu dessen Betrieb |
KR101359562B1 (ko) | 2005-07-08 | 2014-02-07 | 넥스젠 세미 홀딩 인코포레이티드 | 제어 입자 빔 제조를 위한 장치 및 방법 |
WO2008140585A1 (fr) | 2006-11-22 | 2008-11-20 | Nexgen Semi Holding, Inc. | Appareil et procédé de fabrication de masque conforme |
US10566169B1 (en) | 2008-06-30 | 2020-02-18 | Nexgen Semi Holding, Inc. | Method and device for spatial charged particle bunching |
US10991545B2 (en) | 2008-06-30 | 2021-04-27 | Nexgen Semi Holding, Inc. | Method and device for spatial charged particle bunching |
US9245722B2 (en) * | 2013-09-16 | 2016-01-26 | Georgia Tech Research Corporation | SMS probe and SEM imaging system and methods of use |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2245080A1 (fr) * | 1973-09-24 | 1975-04-18 | Max Planck Gesellschaft | |
FR2266166A1 (fr) * | 1974-03-25 | 1975-10-24 | Max Planck Gesellschaft |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034439B1 (fr) * | 1969-05-16 | 1975-11-08 | ||
US3894233A (en) * | 1972-10-27 | 1975-07-08 | Hitachi Ltd | Ion microprobe analyzer |
DE2255302C3 (de) * | 1972-11-11 | 1980-09-11 | Leybold-Heraeus Gmbh, 5000 Koeln | Einrichtung für die Sekundär-Ionen-Massenspektroskopie |
JPS5015594A (fr) * | 1973-06-08 | 1975-02-19 |
-
1975
- 1975-12-13 DE DE2556291A patent/DE2556291C3/de not_active Expired
-
1976
- 1976-05-07 GB GB18755/76A patent/GB1490496A/en not_active Expired
- 1976-07-01 US US05/701,683 patent/US4132892A/en not_active Expired - Lifetime
- 1976-08-03 FR FR7623714A patent/FR2335038A1/fr active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2245080A1 (fr) * | 1973-09-24 | 1975-04-18 | Max Planck Gesellschaft | |
FR2266166A1 (fr) * | 1974-03-25 | 1975-10-24 | Max Planck Gesellschaft |
Non-Patent Citations (1)
Title |
---|
NV86/68 * |
Also Published As
Publication number | Publication date |
---|---|
GB1490496A (en) | 1977-11-02 |
DE2556291B2 (de) | 1980-03-27 |
DE2556291C3 (de) | 1980-11-27 |
DE2556291A1 (de) | 1977-06-23 |
US4132892A (en) | 1979-01-02 |
FR2335038B1 (fr) | 1981-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |