FR2335038B1 - - Google Patents

Info

Publication number
FR2335038B1
FR2335038B1 FR7623714A FR7623714A FR2335038B1 FR 2335038 B1 FR2335038 B1 FR 2335038B1 FR 7623714 A FR7623714 A FR 7623714A FR 7623714 A FR7623714 A FR 7623714A FR 2335038 B1 FR2335038 B1 FR 2335038B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7623714A
Other versions
FR2335038A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STRAHLEN UMWELTFORSCH GmbH
Original Assignee
STRAHLEN UMWELTFORSCH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STRAHLEN UMWELTFORSCH GmbH filed Critical STRAHLEN UMWELTFORSCH GmbH
Publication of FR2335038A1 publication Critical patent/FR2335038A1/fr
Application granted granted Critical
Publication of FR2335038B1 publication Critical patent/FR2335038B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7623714A 1975-12-13 1976-08-03 Microscope ionique a grille Granted FR2335038A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2556291A DE2556291C3 (de) 1975-12-13 1975-12-13 Raster-Ionenmikroskop

Publications (2)

Publication Number Publication Date
FR2335038A1 FR2335038A1 (fr) 1977-07-08
FR2335038B1 true FR2335038B1 (fr) 1981-09-04

Family

ID=5964353

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7623714A Granted FR2335038A1 (fr) 1975-12-13 1976-08-03 Microscope ionique a grille

Country Status (4)

Country Link
US (1) US4132892A (fr)
DE (1) DE2556291C3 (fr)
FR (1) FR2335038A1 (fr)
GB (1) GB1490496A (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950330C2 (de) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur chemischen Analyse von Proben
US4315153A (en) * 1980-05-19 1982-02-09 Hughes Aircraft Company Focusing ExB mass separator for space-charge dominated ion beams
JPS6197557A (ja) * 1984-10-19 1986-05-16 Kawasaki Steel Corp 二次イオン質量分析装置
US4661702A (en) * 1984-10-24 1987-04-28 The Perkin-Elmer Corporation Primary ion beam raster gating technique for secondary ion mass spectrometer system
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
US4556794A (en) * 1985-01-30 1985-12-03 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
US4829179A (en) * 1986-07-12 1989-05-09 Nissin Electric Company, Limited Surface analyzer
US4785173A (en) * 1987-03-09 1988-11-15 Anelva Corporation Element analyzing apparatus
US4800273A (en) * 1988-01-07 1989-01-24 Phillips Bradway F Secondary ion mass spectrometer
US4968888A (en) * 1989-07-05 1990-11-06 The United States Of America As Represented By The United States Department Of Energy Pulsed field sample neutralization
JP3260663B2 (ja) * 1997-07-23 2002-02-25 沖電気工業株式会社 ホール内表面の組成分布検出方法
US6153880A (en) * 1999-09-30 2000-11-28 Agilent Technologies, Inc. Method and apparatus for performance improvement of mass spectrometers using dynamic ion optics
GB2386747A (en) * 2001-11-08 2003-09-24 Ionoptika Ltd Fullerene ion gun
DE102004030523A1 (de) * 2004-06-18 2006-01-12 Siemens Ag Transportsystem für Nanopartikel und Verfahren zu dessen Betrieb
KR101359562B1 (ko) 2005-07-08 2014-02-07 넥스젠 세미 홀딩 인코포레이티드 제어 입자 빔 제조를 위한 장치 및 방법
WO2008140585A1 (fr) 2006-11-22 2008-11-20 Nexgen Semi Holding, Inc. Appareil et procédé de fabrication de masque conforme
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US10991545B2 (en) 2008-06-30 2021-04-27 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US9245722B2 (en) * 2013-09-16 2016-01-26 Georgia Tech Research Corporation SMS probe and SEM imaging system and methods of use

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (fr) * 1969-05-16 1975-11-08
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
DE2255302C3 (de) * 1972-11-11 1980-09-11 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung für die Sekundär-Ionen-Massenspektroskopie
JPS5015594A (fr) * 1973-06-08 1975-02-19
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
DE2414221C3 (de) * 1974-03-25 1979-01-18 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Also Published As

Publication number Publication date
GB1490496A (en) 1977-11-02
DE2556291B2 (de) 1980-03-27
DE2556291C3 (de) 1980-11-27
DE2556291A1 (de) 1977-06-23
FR2335038A1 (fr) 1977-07-08
US4132892A (en) 1979-01-02

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Legal Events

Date Code Title Description
ST Notification of lapse