FR2309034A1 - Microscope electronique a balayage - Google Patents

Microscope electronique a balayage

Info

Publication number
FR2309034A1
FR2309034A1 FR7611920A FR7611920A FR2309034A1 FR 2309034 A1 FR2309034 A1 FR 2309034A1 FR 7611920 A FR7611920 A FR 7611920A FR 7611920 A FR7611920 A FR 7611920A FR 2309034 A1 FR2309034 A1 FR 2309034A1
Authority
FR
France
Prior art keywords
scanning microscope
electronique
electronique scanning
microscope
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7611920A
Other languages
English (en)
Other versions
FR2309034B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4944175A external-priority patent/JPS51124369A/ja
Priority claimed from JP50118562A external-priority patent/JPS5243355A/ja
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2309034A1 publication Critical patent/FR2309034A1/fr
Application granted granted Critical
Publication of FR2309034B1 publication Critical patent/FR2309034B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7611920A 1975-04-23 1976-04-22 Microscope electronique a balayage Granted FR2309034A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4944175A JPS51124369A (en) 1975-04-23 1975-04-23 Field magnification varying device
JP50118562A JPS5243355A (en) 1975-10-01 1975-10-01 Test data transfer device for electric particle line eqipment

Publications (2)

Publication Number Publication Date
FR2309034A1 true FR2309034A1 (fr) 1976-11-19
FR2309034B1 FR2309034B1 (fr) 1979-06-01

Family

ID=26389836

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7611920A Granted FR2309034A1 (fr) 1975-04-23 1976-04-22 Microscope electronique a balayage

Country Status (3)

Country Link
US (1) US4020343A (fr)
FR (1) FR2309034A1 (fr)
GB (1) GB1560722A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2335945A1 (fr) * 1975-12-19 1977-07-15 Jeol Ltd Dispositif electronique a balayage

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3172441D1 (en) * 1980-10-15 1985-10-31 Toshiba Kk Electron beam exposure system
DE3235727A1 (de) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zum hervorheben eines objektbereichs in einem rastermikroskop
DE3538857A1 (de) * 1985-11-02 1987-05-07 Leybold Heraeus Gmbh & Co Kg Einrichtung fuer die eingabe eines sollwerts fuer den auftreffpunkt eines elektronenstrahls auf ein medium
JPH0487148A (ja) * 1990-07-26 1992-03-19 Shimadzu Corp 試料移動経路指定自動分析装置
US5477049A (en) * 1994-01-21 1995-12-19 Seiko Instruments Inc. Particle analysis method
US5834774A (en) * 1996-07-24 1998-11-10 Jeol Ltd. Scanning electron microscope
JPH1097836A (ja) * 1996-09-24 1998-04-14 Hitachi Keisokki Service Kk 走査形電子顕微鏡
US6727911B1 (en) * 1999-04-28 2004-04-27 Jeol Ltd. Method and apparatus for observing specimen image on scanning charged-particle beam instrument
US7940972B2 (en) * 2007-05-16 2011-05-10 General Electric Company System and method of extended field of view image acquisition of an imaged subject
JP5132774B2 (ja) * 2008-07-01 2013-01-30 株式会社日立メディコ Ｘ線ｃｔ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229087A (en) * 1961-09-25 1966-01-11 First Pennsylvania Banking And Electron microanalyzer and monitoring system
GB1126368A (en) * 1965-12-11 1968-09-05 Ti Group Services Ltd Method of calibrating scanning micro-analysers, and apparatus therefor
US3795808A (en) * 1971-05-18 1974-03-05 P Knights Electron microscopes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2302004A5 (fr) * 1973-08-31 1976-09-17 Thomson Csf Systeme de poursuite automatique d'une cible, procedant par analyse de contraste video

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229087A (en) * 1961-09-25 1966-01-11 First Pennsylvania Banking And Electron microanalyzer and monitoring system
GB1126368A (en) * 1965-12-11 1968-09-05 Ti Group Services Ltd Method of calibrating scanning micro-analysers, and apparatus therefor
US3795808A (en) * 1971-05-18 1974-03-05 P Knights Electron microscopes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2335945A1 (fr) * 1975-12-19 1977-07-15 Jeol Ltd Dispositif electronique a balayage

Also Published As

Publication number Publication date
US4020343A (en) 1977-04-26
FR2309034B1 (fr) 1979-06-01
GB1560722A (en) 1980-02-06

Similar Documents

Publication Publication Date Title
FR2328719A1 (fr) Proc
FR2308929A1 (fr) Proc
PL194236A1 (pl) Srodek detergentowy
DK202376A (da) Skanderingsomsetter
PT66990B (fr) Microscope de type inverti
IT1065060B (it) Composizioni detergenti migliorate a base di solfati di alchiletere
TR19411A (tr) Deterjan tipleri
FR2309034A1 (fr) Microscope electronique a balayage
DK89676A (da) Vaskemiddel
FR2298512A1 (fr) Proc
IT1036796B (it) Microscopio a contrasto di mudulazione
FR2327558A1 (fr) Microscope
AT343936B (de) Mikroskopobjektiv
IT1057711B (it) Pagnetron a cavita riscnante
IT1064368B (it) Benna meccanica
AT346620B (de) Mikroskopkondensor
NL7606427A (nl) Fotoelektrische microscoop.
SE7611873L (sv) Kantlist
AT346619B (de) Mikroskopkondensor
FR2322452A1 (fr) Microscope electronique
SE7612530L (sv) Flerverda fenolsamestrar
JPS51109263A (ja) Kinzokusutoritsupuno 2 jokirisuritsutoseihinno makitorihoho
FI762582A (fi) Korneamikroskop
FR2300012A1 (fr) Proc
JPS51102355A (ja) Shashinhaiekinifukumareruechirenjiamin 44 sakusannoshoriho

Legal Events

Date Code Title Description
ST Notification of lapse