GB1126368A - Method of calibrating scanning micro-analysers, and apparatus therefor - Google Patents

Method of calibrating scanning micro-analysers, and apparatus therefor

Info

Publication number
GB1126368A
GB1126368A GB5270665A GB5270665A GB1126368A GB 1126368 A GB1126368 A GB 1126368A GB 5270665 A GB5270665 A GB 5270665A GB 5270665 A GB5270665 A GB 5270665A GB 1126368 A GB1126368 A GB 1126368A
Authority
GB
United Kingdom
Prior art keywords
mask
analyser
tube
image
sensing means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5270665A
Inventor
David Austin Melford
Peter Duncumb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TI Group Services Ltd
Original Assignee
TI Group Services Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TI Group Services Ltd filed Critical TI Group Services Ltd
Priority to GB5270665A priority Critical patent/GB1126368A/en
Publication of GB1126368A publication Critical patent/GB1126368A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Abstract

1,126,368. Calibrating scanning radiation analysers. T. I. (GROUP SERVICES) Ltd. March 8, 1967 [Dec. 11, 1965], No. 52706/65. Heading G1A. Scanning X-ray or electron micro-analyser is calibrated by causing the beam of a c.r.o. tube to scan the screen of the tube in a manner similar to that in which the beam of the microanalyser scans an area of a specimen when in normal use, providing an apertured mask which allows only selected parts of the image on the screen of the c.r.o. tube to be "viewed" by sensing means responsive to this image and producing a characteristic signal when the image is visible to it through the apertures in the mask, and causing the signals from the sensing means to control the movement of the beam of the microanalyser, so that it strikes a material of one chemical constitution when the sensing means "views" no image through the apertures in the mask, and causing it to strike a material of another chemical constitution when the sensing means does "view"an image through an aperture in the mask, and then adjusting the means for presenting the output of the analyser so that the output presented by it is consistent with that expected from the examination by the microanalyser of an area of a specimen of said one chemical constitution having inclusions of said other chemical constitution distributed over the area in the same way that the apertures are distributed over the mask. The micro-analyser of Specification 1,046,443 is modified in that the scanning signals for the micro-analyser generated by heads 21, 22 from a magnetic drum 20 are switchable selectively to the deflection coils 13 of the analyser for normal analysis or to the deflection plates 26 of a cathode-ray tube 27 for calibration. The screen of tube 27 is viewed by a photo-multiplier 30 through a brass mask 28 with holes simulating a predetermined pattern of inclusions in a test sample. The output of photomultiplier 30 switches the beam 11 of the analyser between different parts of a reference specimen according as the light from the tube 27 is or is not blocked by the mask 28. The output of the analyser is compared with a known value corresponding to the mask 28 and the circuits 15, 16 and 17 are adjusted until the values are equal.
GB5270665A 1965-12-11 1965-12-11 Method of calibrating scanning micro-analysers, and apparatus therefor Expired GB1126368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB5270665A GB1126368A (en) 1965-12-11 1965-12-11 Method of calibrating scanning micro-analysers, and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5270665A GB1126368A (en) 1965-12-11 1965-12-11 Method of calibrating scanning micro-analysers, and apparatus therefor

Publications (1)

Publication Number Publication Date
GB1126368A true GB1126368A (en) 1968-09-05

Family

ID=10464965

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5270665A Expired GB1126368A (en) 1965-12-11 1965-12-11 Method of calibrating scanning micro-analysers, and apparatus therefor

Country Status (1)

Country Link
GB (1) GB1126368A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2309034A1 (en) * 1975-04-23 1976-11-19 Jeol Ltd ELECTRONIQUE SCANNING MICROSCOPE
CN107192714A (en) * 2017-06-01 2017-09-22 首钢总公司 A kind of method and system for measuring Submerged Nozzle Clogging Course degree

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2309034A1 (en) * 1975-04-23 1976-11-19 Jeol Ltd ELECTRONIQUE SCANNING MICROSCOPE
CN107192714A (en) * 2017-06-01 2017-09-22 首钢总公司 A kind of method and system for measuring Submerged Nozzle Clogging Course degree

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