JPS5243355A - Test data transfer device for electric particle line eqipment - Google Patents
Test data transfer device for electric particle line eqipmentInfo
- Publication number
- JPS5243355A JPS5243355A JP50118562A JP11856275A JPS5243355A JP S5243355 A JPS5243355 A JP S5243355A JP 50118562 A JP50118562 A JP 50118562A JP 11856275 A JP11856275 A JP 11856275A JP S5243355 A JPS5243355 A JP S5243355A
- Authority
- JP
- Japan
- Prior art keywords
- test data
- data transfer
- eqipment
- transfer device
- particle line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
PURPOSE: To calculate the accurate transfer quantity based on position detective sign signal with a write-pen etc., and to improve how to operate the equipment by automatically controlling the test data transfer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50118562A JPS5243355A (en) | 1975-10-01 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
GB14694/76A GB1560722A (en) | 1975-04-23 | 1976-04-09 | Scanning electron microscope |
US05/678,770 US4020343A (en) | 1975-04-23 | 1976-04-21 | Scanning electron device |
FR7611920A FR2309034A1 (en) | 1975-04-23 | 1976-04-22 | ELECTRONIQUE SCANNING MICROSCOPE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50118562A JPS5243355A (en) | 1975-10-01 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5243355A true JPS5243355A (en) | 1977-04-05 |
JPS561745B2 JPS561745B2 (en) | 1981-01-14 |
Family
ID=14739657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50118562A Granted JPS5243355A (en) | 1975-04-23 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5243355A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59148254A (en) * | 1983-02-10 | 1984-08-24 | Jeol Ltd | Sample shifting device of scanning electron microscope or the like |
JPS63228556A (en) * | 1987-03-18 | 1988-09-22 | Hitachi Ltd | Scanning electron microscope |
JPH02174045A (en) * | 1988-12-27 | 1990-07-05 | Hitachi Ltd | Sample bed moving device and electron microscope using same |
JPH02174046A (en) * | 1988-12-27 | 1990-07-05 | Hitachi Ltd | Electron microscope and control method for sample fine mover used therefor |
JP2017084483A (en) * | 2015-10-23 | 2017-05-18 | 日本電子株式会社 | Calibration method and charged particle beam device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5341062A (en) * | 1977-05-12 | 1978-04-14 | Nippon Fuirutaa Kk | Purifying method and apparatus for drainage by microorganism |
-
1975
- 1975-10-01 JP JP50118562A patent/JPS5243355A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5341062A (en) * | 1977-05-12 | 1978-04-14 | Nippon Fuirutaa Kk | Purifying method and apparatus for drainage by microorganism |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59148254A (en) * | 1983-02-10 | 1984-08-24 | Jeol Ltd | Sample shifting device of scanning electron microscope or the like |
JPH0343742B2 (en) * | 1983-02-10 | 1991-07-03 | Nippon Electron Optics Lab | |
JPS63228556A (en) * | 1987-03-18 | 1988-09-22 | Hitachi Ltd | Scanning electron microscope |
JPH02174045A (en) * | 1988-12-27 | 1990-07-05 | Hitachi Ltd | Sample bed moving device and electron microscope using same |
JPH02174046A (en) * | 1988-12-27 | 1990-07-05 | Hitachi Ltd | Electron microscope and control method for sample fine mover used therefor |
JP2017084483A (en) * | 2015-10-23 | 2017-05-18 | 日本電子株式会社 | Calibration method and charged particle beam device |
US10014156B2 (en) | 2015-10-23 | 2018-07-03 | Jeol Ltd. | Calibration method and charged particle beam system |
Also Published As
Publication number | Publication date |
---|---|
JPS561745B2 (en) | 1981-01-14 |
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