GB1472356A - Instrument for secondary ion mass spectroscopy - Google Patents

Instrument for secondary ion mass spectroscopy

Info

Publication number
GB1472356A
GB1472356A GB2101775A GB2101775A GB1472356A GB 1472356 A GB1472356 A GB 1472356A GB 2101775 A GB2101775 A GB 2101775A GB 2101775 A GB2101775 A GB 2101775A GB 1472356 A GB1472356 A GB 1472356A
Authority
GB
United Kingdom
Prior art keywords
secondary ion
instrument
mass spectroscopy
ion mass
lens system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2101775A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1472356A publication Critical patent/GB1472356A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/044—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for preventing droplets from entering the analyzer; Desolvation of droplets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB2101775A 1974-05-18 1975-05-16 Instrument for secondary ion mass spectroscopy Expired GB1472356A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742424306 DE2424306A1 (de) 1974-05-18 1974-05-18 Einrichtung fuer die sekundaer-ionenmassenspektroskopie

Publications (1)

Publication Number Publication Date
GB1472356A true GB1472356A (en) 1977-05-04

Family

ID=5915979

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2101775A Expired GB1472356A (en) 1974-05-18 1975-05-16 Instrument for secondary ion mass spectroscopy

Country Status (4)

Country Link
CH (1) CH585965A5 (enrdf_load_html_response)
DE (1) DE2424306A1 (enrdf_load_html_response)
FR (1) FR2271662B2 (enrdf_load_html_response)
GB (1) GB1472356A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194843A (ja) * 1989-12-25 1991-08-26 Hitachi Ltd プラズマイオン源極微量元素質量分析装置

Also Published As

Publication number Publication date
CH585965A5 (enrdf_load_html_response) 1977-03-15
FR2271662A2 (enrdf_load_html_response) 1975-12-12
FR2271662B2 (enrdf_load_html_response) 1978-07-13
DE2424306A1 (de) 1975-11-27

Similar Documents

Publication Publication Date Title
GB1332207A (en) Apparatus for charged particle spectroscopy
GB1490496A (en) Raster scanning ion microscope with quadrupole mass filte
FR2286501A1 (fr) Installation de detection d'ions par spectrometrie de masse
GB1399588A (en) Instrument for secondary ion mass spectrometry
GB1537250A (en) Prefilter-ionizer apparatus for use with secondary ion mass spectrometers
GB1487960A (en) Device for surface analysis by ion scattering
ES467038A1 (es) Procedimiento para eliminar isobuteno a partir de corrientesde hidrocarburos de cuatro atomos de carbono que contienen butadieno.
GB1536384A (en) Method for producing an ion filter for a mass analyser
GB1472356A (en) Instrument for secondary ion mass spectroscopy
GB1059599A (en) Separation of ions which differ in their respective specific electric charges
GB1134448A (en) Double focussing mass spectrometer
GB1404693A (en) Microanalyser convertible into a mass-spectrometer
JPS5787055A (en) Ion implantation device
JPS5520637B2 (enrdf_load_html_response)
GB1445963A (en) Ion beam apparatus
EP0046244A3 (de) Vorrichtung zur bildmässigen Darstellung einer Strahlungs-intensitätsverteilung
JPS5327487A (en) Sample analyzer
SU139031A1 (ru) Двойной магнитный масс-спектрометр
GB1000811A (en) Producing high velocity charged particles
GB1147667A (en) Improvements in or relating to mass spectrometers
GB1149084A (en) Improvements in or relating to spectrometers
JPS5284793A (en) Ion surce device of mass spectrometer
GB957117A (en) Improvements relating to mass spectrometers
GB968912A (en) Improvements in or relating to mass spectrometers
GB1157158A (en) Mass Spectrometer

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee