GB1470847A - Surface-layer analysis by ion scattering - Google Patents

Surface-layer analysis by ion scattering

Info

Publication number
GB1470847A
GB1470847A GB1958774A GB1958774A GB1470847A GB 1470847 A GB1470847 A GB 1470847A GB 1958774 A GB1958774 A GB 1958774A GB 1958774 A GB1958774 A GB 1958774A GB 1470847 A GB1470847 A GB 1470847A
Authority
GB
United Kingdom
Prior art keywords
ion beam
ions
detector
annular
scattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1958774A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1470847A publication Critical patent/GB1470847A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB1958774A 1973-05-08 1974-05-03 Surface-layer analysis by ion scattering Expired GB1470847A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (xx) 1973-05-08 1973-05-08

Publications (1)

Publication Number Publication Date
GB1470847A true GB1470847A (en) 1977-04-21

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1958774A Expired GB1470847A (en) 1973-05-08 1974-05-03 Surface-layer analysis by ion scattering

Country Status (6)

Country Link
US (1) US3920990A (xx)
JP (1) JPS5514504B2 (xx)
DE (1) DE2420275C3 (xx)
FR (1) FR2229064B1 (xx)
GB (1) GB1470847A (xx)
NL (1) NL7306378A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215909A (en) * 1988-02-05 1989-09-27 Strahlen Umweltforsch Gmbh Depth differential analysis of solid samples using analysing and sputtering ion beams

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
DE3041914A1 (de) * 1980-11-06 1982-06-16 Vdo Adolf Schindling Ag, 6000 Frankfurt Einrichtung zur kapazitiven fuellstandsmessung
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
AU712743B2 (en) * 1994-12-08 1999-11-18 Regents Of The University Of California, The Method and device for enhancing the recognition of speech among speech-impaired individuals
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3735128A (en) * 1971-08-27 1973-05-22 Physical Electronics Ind Inc Field termination plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215909A (en) * 1988-02-05 1989-09-27 Strahlen Umweltforsch Gmbh Depth differential analysis of solid samples using analysing and sputtering ion beams
GB2215909B (en) * 1988-02-05 1992-09-16 Strahlen Umweltforsch Gmbh Method and apparatus for the quantitative,depth differential analysis of solid samples with the use of two ion beams

Also Published As

Publication number Publication date
FR2229064A1 (xx) 1974-12-06
JPS5514504B2 (xx) 1980-04-16
US3920990A (en) 1975-11-18
DE2420275B2 (de) 1980-09-25
DE2420275C3 (de) 1981-07-09
DE2420275A1 (de) 1974-11-28
FR2229064B1 (xx) 1977-06-24
JPS5028393A (xx) 1975-03-22
NL7306378A (xx) 1974-11-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee