JPS5514504B2 - - Google Patents

Info

Publication number
JPS5514504B2
JPS5514504B2 JP4930274A JP4930274A JPS5514504B2 JP S5514504 B2 JPS5514504 B2 JP S5514504B2 JP 4930274 A JP4930274 A JP 4930274A JP 4930274 A JP4930274 A JP 4930274A JP S5514504 B2 JPS5514504 B2 JP S5514504B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4930274A
Other languages
Japanese (ja)
Other versions
JPS5028393A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5028393A publication Critical patent/JPS5028393A/ja
Publication of JPS5514504B2 publication Critical patent/JPS5514504B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP4930274A 1973-05-08 1974-05-04 Expired JPS5514504B2 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (xx) 1973-05-08 1973-05-08

Publications (2)

Publication Number Publication Date
JPS5028393A JPS5028393A (xx) 1975-03-22
JPS5514504B2 true JPS5514504B2 (xx) 1980-04-16

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4930274A Expired JPS5514504B2 (xx) 1973-05-08 1974-05-04

Country Status (6)

Country Link
US (1) US3920990A (xx)
JP (1) JPS5514504B2 (xx)
DE (1) DE2420275C3 (xx)
FR (1) FR2229064B1 (xx)
GB (1) GB1470847A (xx)
NL (1) NL7306378A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器
JPH0256616B2 (xx) * 1980-11-06 1990-11-30 Fuao Dee Oo Aadorufu Shintoringu Ag

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
AU712743B2 (en) * 1994-12-08 1999-11-18 Regents Of The University Of California, The Method and device for enhancing the recognition of speech among speech-impaired individuals
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
JPS4832588A (xx) * 1971-08-27 1973-04-28

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
JPS4832588A (xx) * 1971-08-27 1973-04-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0256616B2 (xx) * 1980-11-06 1990-11-30 Fuao Dee Oo Aadorufu Shintoringu Ag
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器

Also Published As

Publication number Publication date
FR2229064A1 (xx) 1974-12-06
US3920990A (en) 1975-11-18
GB1470847A (en) 1977-04-21
DE2420275B2 (de) 1980-09-25
DE2420275C3 (de) 1981-07-09
DE2420275A1 (de) 1974-11-28
FR2229064B1 (xx) 1977-06-24
JPS5028393A (xx) 1975-03-22
NL7306378A (xx) 1974-11-12

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