DE2420275C3 - Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung - Google Patents

Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung

Info

Publication number
DE2420275C3
DE2420275C3 DE2420275A DE2420275A DE2420275C3 DE 2420275 C3 DE2420275 C3 DE 2420275C3 DE 2420275 A DE2420275 A DE 2420275A DE 2420275 A DE2420275 A DE 2420275A DE 2420275 C3 DE2420275 C3 DE 2420275C3
Authority
DE
Germany
Prior art keywords
ions
analyzer
axis
ion beam
surface layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2420275A
Other languages
German (de)
English (en)
Other versions
DE2420275B2 (de
DE2420275A1 (de
Inventor
Nicolaas Hazewindus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2420275A1 publication Critical patent/DE2420275A1/de
Publication of DE2420275B2 publication Critical patent/DE2420275B2/de
Application granted granted Critical
Publication of DE2420275C3 publication Critical patent/DE2420275C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE2420275A 1973-05-08 1974-04-26 Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung Expired DE2420275C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (xx) 1973-05-08 1973-05-08

Publications (3)

Publication Number Publication Date
DE2420275A1 DE2420275A1 (de) 1974-11-28
DE2420275B2 DE2420275B2 (de) 1980-09-25
DE2420275C3 true DE2420275C3 (de) 1981-07-09

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2420275A Expired DE2420275C3 (de) 1973-05-08 1974-04-26 Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung

Country Status (6)

Country Link
US (1) US3920990A (xx)
JP (1) JPS5514504B2 (xx)
DE (1) DE2420275C3 (xx)
FR (1) FR2229064B1 (xx)
GB (1) GB1470847A (xx)
NL (1) NL7306378A (xx)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
DE3041914A1 (de) * 1980-11-06 1982-06-16 Vdo Adolf Schindling Ag, 6000 Frankfurt Einrichtung zur kapazitiven fuellstandsmessung
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
DE69526805T2 (de) * 1994-12-08 2002-11-07 Univ California Verfahren und vorrichtung zur verbesserung des sprachverständnisses bei sprachbehinderten personen
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) * 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3735128A (en) * 1971-08-27 1973-05-22 Physical Electronics Ind Inc Field termination plate

Also Published As

Publication number Publication date
JPS5028393A (xx) 1975-03-22
DE2420275B2 (de) 1980-09-25
GB1470847A (en) 1977-04-21
US3920990A (en) 1975-11-18
FR2229064A1 (xx) 1974-12-06
FR2229064B1 (xx) 1977-06-24
JPS5514504B2 (xx) 1980-04-16
DE2420275A1 (de) 1974-11-28
NL7306378A (xx) 1974-11-12

Similar Documents

Publication Publication Date Title
DE3940900C2 (xx)
EP0969495B1 (de) Teilchenstrahlgerät mit Sekundärelektronen-Detektor
DE2420275C3 (de) Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung
DE69910986T2 (de) Analysator für atmosphärische Teilchen
DE69737942T2 (de) Verfahren zum Erreichen eines im Wesentlichen gleichförmigen Oberflächenpotentials eines isolierenden Objektes
DE1798021A1 (de) Mikroanalysenvorrichtung
DE19941670A1 (de) Massenspektrometer
DE2255302C3 (de) Einrichtung für die Sekundär-Ionen-Massenspektroskopie
DE2152467C3 (de) Gerät zur Elementenanalyse
DE2458025C2 (de) Analysevorrichtung für eine Oberflächenschicht
DE1937482B2 (de) Mikrostrahlsonde
DE1922871A1 (de) Verfahren und Vorrichtung zur Ionenerzeugung
DE2534796A1 (de) Ionen-elektronen-konverter
DE2041422A1 (de) Elementanalysator
DE2340372A1 (de) Doppelfokussierendes massenspektrometer hoher eingangsapertur
DE2712857A1 (de) Ionenstreuspektrometer mit abgeaenderter vorspannungsversorgung
DE2705430A1 (de) Elektrostatischer analysator fuer geladene teilchen
DE2402728C3 (de) Vorrichtung zum Analysieren einer Oberflachenschicht durch Ionenzerstreuung
DE2950330C2 (de) Vorrichtung zur chemischen Analyse von Proben
DE2105805A1 (de) Gerat zur Elektronenspektroskopie
DE2542362C3 (de) Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselben
DE3144604A1 (de) Vorrichtung zur untersuchung einer probe
EP1817788B1 (de) Flugzeit-massenspektrometer
DE2835978A1 (de) Energieanalysator zur analyse der energie geladener teilchen
DE939173C (de) Vorrichtung zur Beobachtung von Gasen oder Daempfen in Vakuumapparaten durch massenabhaengige Ionentrennung

Legal Events

Date Code Title Description
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee