GB1440627A - Method for manufacturing integrated circuits - Google Patents

Method for manufacturing integrated circuits

Info

Publication number
GB1440627A
GB1440627A GB2725073A GB2725073A GB1440627A GB 1440627 A GB1440627 A GB 1440627A GB 2725073 A GB2725073 A GB 2725073A GB 2725073 A GB2725073 A GB 2725073A GB 1440627 A GB1440627 A GB 1440627A
Authority
GB
United Kingdom
Prior art keywords
conductors
layer
group
silica
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2725073A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1440627A publication Critical patent/GB1440627A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
  • Element Separation (AREA)
GB2725073A 1972-06-15 1973-06-07 Method for manufacturing integrated circuits Expired GB1440627A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7221657A FR2188304B1 (https=) 1972-06-15 1972-06-15

Publications (1)

Publication Number Publication Date
GB1440627A true GB1440627A (en) 1976-06-23

Family

ID=9100271

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2725073A Expired GB1440627A (en) 1972-06-15 1973-06-07 Method for manufacturing integrated circuits

Country Status (7)

Country Link
US (1) US3930305A (https=)
JP (1) JPS588143B2 (https=)
DE (1) DE2330645C3 (https=)
FR (1) FR2188304B1 (https=)
GB (1) GB1440627A (https=)
IT (1) IT986462B (https=)
NL (1) NL182107C (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621332A (en) * 1979-07-31 1981-02-27 Fujitsu Ltd Manufacture of semiconductor device
DE3828812A1 (de) * 1988-08-25 1990-03-08 Fraunhofer Ges Forschung Dreidimensionale integrierte schaltung und verfahren zu deren herstellung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274453A (en) * 1961-02-20 1966-09-20 Philco Corp Semiconductor integrated structures and methods for the fabrication thereof
US3341753A (en) * 1964-10-21 1967-09-12 Texas Instruments Inc Metallic contacts for semiconductor devices
US3667005A (en) * 1966-06-30 1972-05-30 Texas Instruments Inc Ohmic contacts for semiconductors devices
NL153374B (nl) * 1966-10-05 1977-05-16 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting voorzien van een oxydelaag en halfgeleiderinrichting vervaardigd volgens de werkwijze.
US3434020A (en) * 1966-12-30 1969-03-18 Texas Instruments Inc Ohmic contacts consisting of a first level of molybdenum-gold mixture of gold and vanadium and a second level of molybdenum-gold
NL158024B (nl) * 1967-05-13 1978-09-15 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting en halfgeleiderinrichting verkregen door toepassing van de werkwijze.
US3495324A (en) * 1967-11-13 1970-02-17 Sperry Rand Corp Ohmic contact for planar devices
US3642528A (en) * 1968-06-05 1972-02-15 Matsushita Electronics Corp Semiconductor device and method of making same
US3641661A (en) * 1968-06-25 1972-02-15 Texas Instruments Inc Method of fabricating integrated circuit arrays
US3700508A (en) * 1970-06-25 1972-10-24 Gen Instrument Corp Fabrication of integrated microcircuit devices
JPS4851595A (https=) * 1971-10-29 1973-07-19

Also Published As

Publication number Publication date
NL182107B (nl) 1987-08-03
DE2330645B2 (de) 1976-11-18
FR2188304A1 (https=) 1974-01-18
NL7308278A (https=) 1973-12-18
NL182107C (nl) 1988-01-04
FR2188304B1 (https=) 1977-07-22
DE2330645A1 (de) 1974-01-24
JPS4952589A (https=) 1974-05-22
DE2330645C3 (de) 1982-07-08
JPS588143B2 (ja) 1983-02-14
US3930305A (en) 1976-01-06
IT986462B (it) 1975-01-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee