GB1430193A - Illumination optical system of projection printing apparatus - Google Patents

Illumination optical system of projection printing apparatus

Info

Publication number
GB1430193A
GB1430193A GB861573A GB861573A GB1430193A GB 1430193 A GB1430193 A GB 1430193A GB 861573 A GB861573 A GB 861573A GB 861573 A GB861573 A GB 861573A GB 1430193 A GB1430193 A GB 1430193A
Authority
GB
United Kingdom
Prior art keywords
lens
printing
illumination
eccentric lens
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB861573A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB1430193A publication Critical patent/GB1430193A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
GB861573A 1972-02-23 1973-02-22 Illumination optical system of projection printing apparatus Expired GB1430193A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1802472A JPS5429901B2 (enrdf_load_stackoverflow) 1972-02-23 1972-02-23

Publications (1)

Publication Number Publication Date
GB1430193A true GB1430193A (en) 1976-03-31

Family

ID=11960084

Family Applications (1)

Application Number Title Priority Date Filing Date
GB861573A Expired GB1430193A (en) 1972-02-23 1973-02-22 Illumination optical system of projection printing apparatus

Country Status (3)

Country Link
JP (1) JPS5429901B2 (enrdf_load_stackoverflow)
DE (1) DE2309072C3 (enrdf_load_stackoverflow)
GB (1) GB1430193A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106292735A (zh) * 2016-08-19 2017-01-04 泉州市汉威机械制造有限公司 一种材料影像定位控制方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56110234A (en) * 1980-02-06 1981-09-01 Canon Inc Projection printing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106292735A (zh) * 2016-08-19 2017-01-04 泉州市汉威机械制造有限公司 一种材料影像定位控制方法
CN106292735B (zh) * 2016-08-19 2019-06-28 泉州市汉威机械制造有限公司 一种材料影像定位控制方法

Also Published As

Publication number Publication date
DE2309072C3 (de) 1980-09-25
DE2309072A1 (de) 1973-09-13
JPS5429901B2 (enrdf_load_stackoverflow) 1979-09-27
DE2309072B2 (de) 1980-01-24
JPS4888949A (enrdf_load_stackoverflow) 1973-11-21

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19930221