GB1428702A - System for vapour deposition of thin films - Google Patents

System for vapour deposition of thin films

Info

Publication number
GB1428702A
GB1428702A GB1767973A GB1767973A GB1428702A GB 1428702 A GB1428702 A GB 1428702A GB 1767973 A GB1767973 A GB 1767973A GB 1767973 A GB1767973 A GB 1767973A GB 1428702 A GB1428702 A GB 1428702A
Authority
GB
United Kingdom
Prior art keywords
mandrels
coating
gear
bodies
crucibles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1767973A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Priority to GB3358775A priority Critical patent/GB1428703A/en
Publication of GB1428702A publication Critical patent/GB1428702A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB1767973A 1972-04-17 1973-04-12 System for vapour deposition of thin films Expired GB1428702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3358775A GB1428703A (en) 1972-04-17 1973-04-12 Vapour deposition of thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24437472A 1972-04-17 1972-04-17

Publications (1)

Publication Number Publication Date
GB1428702A true GB1428702A (en) 1976-03-17

Family

ID=22922463

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1767973A Expired GB1428702A (en) 1972-04-17 1973-04-12 System for vapour deposition of thin films

Country Status (4)

Country Link
JP (1) JPS5328871B2 (enrdf_load_stackoverflow)
BE (1) BE798324A (enrdf_load_stackoverflow)
GB (1) GB1428702A (enrdf_load_stackoverflow)
NL (1) NL7305323A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0043248A1 (en) * 1980-07-01 1982-01-06 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
CN107513688A (zh) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 一种真空镀膜机
CN108359934A (zh) * 2018-03-26 2018-08-03 吉林大学 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘
CN111424252A (zh) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 一种管料加工真空镀膜箱体
CN120625016A (zh) * 2025-08-13 2025-09-12 太原师范学院 一种光催化材料制备装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107287A (ja) * 1975-03-18 1976-09-22 Fujikoshi Kk Koshitsuhimakukeiseisochi

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0043248A1 (en) * 1980-07-01 1982-01-06 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
CN107513688A (zh) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 一种真空镀膜机
CN108359934A (zh) * 2018-03-26 2018-08-03 吉林大学 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘
CN111424252A (zh) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 一种管料加工真空镀膜箱体
CN120625016A (zh) * 2025-08-13 2025-09-12 太原师范学院 一种光催化材料制备装置

Also Published As

Publication number Publication date
BE798324A (fr) 1973-10-17
JPS5328871B2 (enrdf_load_stackoverflow) 1978-08-17
NL7305323A (enrdf_load_stackoverflow) 1973-06-25
JPS4917380A (enrdf_load_stackoverflow) 1974-02-15

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19930411