BE798324A - Systeme perfectionne pour le depot en phase vapeur de pellicules minces - Google Patents
Systeme perfectionne pour le depot en phase vapeur de pellicules mincesInfo
- Publication number
- BE798324A BE798324A BE130102A BE130102A BE798324A BE 798324 A BE798324 A BE 798324A BE 130102 A BE130102 A BE 130102A BE 130102 A BE130102 A BE 130102A BE 798324 A BE798324 A BE 798324A
- Authority
- BE
- Belgium
- Prior art keywords
- vapor phase
- thin films
- phase deposit
- perfected system
- perfected
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24437472A | 1972-04-17 | 1972-04-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE798324A true BE798324A (fr) | 1973-10-17 |
Family
ID=22922463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE130102A BE798324A (fr) | 1972-04-17 | 1973-04-17 | Systeme perfectionne pour le depot en phase vapeur de pellicules minces |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5328871B2 (fr) |
BE (1) | BE798324A (fr) |
GB (1) | GB1428702A (fr) |
NL (1) | NL7305323A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51107287A (ja) * | 1975-03-18 | 1976-09-22 | Fujikoshi Kk | Koshitsuhimakukeiseisochi |
EP0043248B1 (fr) * | 1980-07-01 | 1984-05-30 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Procédé pour la production en masse d'alliages et appareil à cet effet |
CN107513688A (zh) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | 一种真空镀膜机 |
CN108359934B (zh) * | 2018-03-26 | 2020-01-07 | 吉林大学 | 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘 |
CN111424252A (zh) * | 2020-04-27 | 2020-07-17 | 台州市思考特机器人科技有限公司 | 一种管料加工真空镀膜箱体 |
-
1973
- 1973-04-12 GB GB1767973A patent/GB1428702A/en not_active Expired
- 1973-04-16 JP JP4301873A patent/JPS5328871B2/ja not_active Expired
- 1973-04-16 NL NL7305323A patent/NL7305323A/xx not_active Application Discontinuation
- 1973-04-17 BE BE130102A patent/BE798324A/fr not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPS4917380A (fr) | 1974-02-15 |
JPS5328871B2 (fr) | 1978-08-17 |
NL7305323A (fr) | 1973-06-25 |
GB1428702A (en) | 1976-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: XEROX CORP. Effective date: 19890430 |