BE798324A - Systeme perfectionne pour le depot en phase vapeur de pellicules minces - Google Patents

Systeme perfectionne pour le depot en phase vapeur de pellicules minces

Info

Publication number
BE798324A
BE798324A BE130102A BE130102A BE798324A BE 798324 A BE798324 A BE 798324A BE 130102 A BE130102 A BE 130102A BE 130102 A BE130102 A BE 130102A BE 798324 A BE798324 A BE 798324A
Authority
BE
Belgium
Prior art keywords
vapor phase
thin films
phase deposit
perfected system
perfected
Prior art date
Application number
BE130102A
Other languages
English (en)
French (fr)
Inventor
F J Erhart
H H Schroeder
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of BE798324A publication Critical patent/BE798324A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE130102A 1972-04-17 1973-04-17 Systeme perfectionne pour le depot en phase vapeur de pellicules minces BE798324A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24437472A 1972-04-17 1972-04-17

Publications (1)

Publication Number Publication Date
BE798324A true BE798324A (fr) 1973-10-17

Family

ID=22922463

Family Applications (1)

Application Number Title Priority Date Filing Date
BE130102A BE798324A (fr) 1972-04-17 1973-04-17 Systeme perfectionne pour le depot en phase vapeur de pellicules minces

Country Status (4)

Country Link
JP (1) JPS5328871B2 (enrdf_load_stackoverflow)
BE (1) BE798324A (enrdf_load_stackoverflow)
GB (1) GB1428702A (enrdf_load_stackoverflow)
NL (1) NL7305323A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107287A (ja) * 1975-03-18 1976-09-22 Fujikoshi Kk Koshitsuhimakukeiseisochi
EP0043248B1 (en) * 1980-07-01 1984-05-30 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
CN107513688A (zh) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 一种真空镀膜机
CN108359934B (zh) * 2018-03-26 2020-01-07 吉林大学 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘
CN111424252A (zh) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 一种管料加工真空镀膜箱体

Also Published As

Publication number Publication date
GB1428702A (en) 1976-03-17
JPS5328871B2 (enrdf_load_stackoverflow) 1978-08-17
NL7305323A (enrdf_load_stackoverflow) 1973-06-25
JPS4917380A (enrdf_load_stackoverflow) 1974-02-15

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: XEROX CORP.

Effective date: 19890430