GB1405447A - Crystal growing apparatus - Google Patents

Crystal growing apparatus

Info

Publication number
GB1405447A
GB1405447A GB4480572A GB4480572A GB1405447A GB 1405447 A GB1405447 A GB 1405447A GB 4480572 A GB4480572 A GB 4480572A GB 4480572 A GB4480572 A GB 4480572A GB 1405447 A GB1405447 A GB 1405447A
Authority
GB
United Kingdom
Prior art keywords
photo
cells
melt
crystal
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4480572A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1405447A publication Critical patent/GB1405447A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
GB4480572A 1971-10-01 1972-09-28 Crystal growing apparatus Expired GB1405447A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712149093 DE2149093C3 (de) 1971-10-01 1971-10-01 Vorrichtung zur Züchtung von Einkristallen durch Ziehen aus einer Schmelze

Publications (1)

Publication Number Publication Date
GB1405447A true GB1405447A (en) 1975-09-10

Family

ID=5821216

Family Applications (2)

Application Number Title Priority Date Filing Date
GB4480472A Expired GB1400593A (en) 1971-10-01 1972-09-28 Growing crystals from a melt
GB4480572A Expired GB1405447A (en) 1971-10-01 1972-09-28 Crystal growing apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB4480472A Expired GB1400593A (en) 1971-10-01 1972-09-28 Growing crystals from a melt

Country Status (10)

Country Link
JP (2) JPS533757B2 (enrdf_load_stackoverflow)
AU (2) AU4716872A (enrdf_load_stackoverflow)
BE (2) BE789554A (enrdf_load_stackoverflow)
CA (1) CA997255A (enrdf_load_stackoverflow)
CH (2) CH559062A5 (enrdf_load_stackoverflow)
DE (1) DE2149093C3 (enrdf_load_stackoverflow)
FR (2) FR2154777B1 (enrdf_load_stackoverflow)
GB (2) GB1400593A (enrdf_load_stackoverflow)
IT (2) IT967977B (enrdf_load_stackoverflow)
NL (2) NL7213119A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134680A3 (en) * 1983-07-29 1987-07-15 Kabushiki Kaisha Toshiba Apparatus for manufacturing a single crystal
EP0294311A1 (en) * 1987-06-05 1988-12-07 Shin-Etsu Handotai Company Limited Automatic control of crystal rod diameter
EP0456370A3 (en) * 1990-04-27 1992-08-12 Nkk Corporation Method and apparatus for controlling the diameter of a silicon single crystal
CN115613121A (zh) * 2022-11-18 2023-01-17 浙江晶盛机电股份有限公司 晶体生产设备及籽晶的断裂方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612863B2 (enrdf_load_stackoverflow) * 1973-07-11 1981-03-25
FI87660C (fi) * 1988-03-03 1993-02-10 Leybold Ag Foerfarande och anordning foer dragning av monokristaller
DE4301072B4 (de) * 1993-01-16 2006-08-24 Crystal Growing Systems Gmbh Verfahren zum Ziehen von Einkristallen aus einer Schmelze
CN115178756B (zh) * 2022-07-15 2023-05-12 中国科学院重庆绿色智能技术研究院 一种激光选区熔化瞬态熔池特征高分辨率成像装置及方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134680A3 (en) * 1983-07-29 1987-07-15 Kabushiki Kaisha Toshiba Apparatus for manufacturing a single crystal
EP0294311A1 (en) * 1987-06-05 1988-12-07 Shin-Etsu Handotai Company Limited Automatic control of crystal rod diameter
US4876438A (en) * 1987-06-05 1989-10-24 Shin-Etu Handotai Co., Ltd. Control of the power to the heater and the speed of movement of a crystal rod by control of the crystal rod diameter
EP0456370A3 (en) * 1990-04-27 1992-08-12 Nkk Corporation Method and apparatus for controlling the diameter of a silicon single crystal
CN115613121A (zh) * 2022-11-18 2023-01-17 浙江晶盛机电股份有限公司 晶体生产设备及籽晶的断裂方法

Also Published As

Publication number Publication date
CH558206A (de) 1975-01-31
CA997255A (en) 1976-09-21
DE2149093B2 (de) 1974-12-05
BE789554A (fr) 1973-03-29
JPS4842981A (enrdf_load_stackoverflow) 1973-06-21
JPS533757B2 (enrdf_load_stackoverflow) 1978-02-09
AU4716772A (en) 1974-04-04
JPS4842980A (enrdf_load_stackoverflow) 1973-06-21
NL7213118A (enrdf_load_stackoverflow) 1973-04-03
NL7213119A (enrdf_load_stackoverflow) 1973-04-03
IT967977B (it) 1974-03-11
FR2154776B1 (enrdf_load_stackoverflow) 1976-08-20
FR2154777B1 (enrdf_load_stackoverflow) 1976-08-20
FR2154776A1 (enrdf_load_stackoverflow) 1973-05-11
FR2154777A1 (enrdf_load_stackoverflow) 1973-05-11
AU4716872A (en) 1974-04-04
BE789553A (fr) 1973-03-29
DE2149093C3 (de) 1975-07-24
JPS5238512B2 (enrdf_load_stackoverflow) 1977-09-29
GB1400593A (en) 1975-07-16
IT967978B (it) 1974-03-11
CH559062A5 (enrdf_load_stackoverflow) 1975-02-28
DE2149093A1 (de) 1973-04-05

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee