GB1475372A - Method for the automatic growth of monocrystals - Google Patents

Method for the automatic growth of monocrystals

Info

Publication number
GB1475372A
GB1475372A GB3236974A GB3236974A GB1475372A GB 1475372 A GB1475372 A GB 1475372A GB 3236974 A GB3236974 A GB 3236974A GB 3236974 A GB3236974 A GB 3236974A GB 1475372 A GB1475372 A GB 1475372A
Authority
GB
United Kingdom
Prior art keywords
melt
crystal
laser
lowering
melt surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3236974A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Publication of GB1475372A publication Critical patent/GB1475372A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

1475372 Automatic growth of mono-crystals LICENTIA PATENT VERWALTUNGS GmbH 22 July 1974 [21 July 1973] 32369/74 Heading BIS A method for automatic drawing of monocrystals from a melt comprises measuring the lowering of the surface of the melt with respect to time and automatically controlling the drawing parameters in dependance on this measurement and on the desired crystal profile. As shown in Fig. 1 a crystal 1 is drawn upwards from a melt 2 in a crucible 3, the height of the upper surface 4 of the melt 2 being continuously measured by means of a laser beam 5 reflected at the melt surface. The path length of the laser beam between the melt surface and a beam divider is part of a Michelson two beam interferometer. The light source comprises a He-Ne laser 6 and, a beam diverter 7, which breaks up the beam coming from the laser into a measuring beam and a reference beam. After the reflection of the measuring beam at the melt surface and of the reference beam at a level 9 both beams are superimposed by means of a beam divider and interference phenomena result. When these optical path lengths change on lowering of the melt surface periodic interference fluctuations occur which are measured by a photo-electric device 8 which controls a regulator (not shown) which controls the calorific power fed to the melt and/or the drawing speed of the crystal so that a chronologically linear lowering of the melt surface is set up which leads to the growth of a constant diameter crystal.
GB3236974A 1973-07-21 1974-07-22 Method for the automatic growth of monocrystals Expired GB1475372A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732337169 DE2337169C2 (en) 1973-07-21 1973-07-21 Method for pulling single crystal rods

Publications (1)

Publication Number Publication Date
GB1475372A true GB1475372A (en) 1977-06-01

Family

ID=5887626

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3236974A Expired GB1475372A (en) 1973-07-21 1974-07-22 Method for the automatic growth of monocrystals

Country Status (2)

Country Link
DE (1) DE2337169C2 (en)
GB (1) GB1475372A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI87660C (en) * 1988-03-03 1993-02-10 Leybold Ag Method and apparatus for drawing monocrystals
DE10234250B4 (en) * 2002-07-27 2008-09-25 Deutsche Solar Ag Device and method for monitoring the crystallization of silicon

Also Published As

Publication number Publication date
DE2337169C2 (en) 1975-06-26
DE2337169B1 (en) 1974-11-07

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee