FR2402476A1 - Procede pour preparer des couches epitaxiales en pbsxse1-x par croissance a l'equilibre - Google Patents
Procede pour preparer des couches epitaxiales en pbsxse1-x par croissance a l'equilibreInfo
- Publication number
- FR2402476A1 FR2402476A1 FR7815873A FR7815873A FR2402476A1 FR 2402476 A1 FR2402476 A1 FR 2402476A1 FR 7815873 A FR7815873 A FR 7815873A FR 7815873 A FR7815873 A FR 7815873A FR 2402476 A1 FR2402476 A1 FR 2402476A1
- Authority
- FR
- France
- Prior art keywords
- epitaxial layers
- equilibrium
- pbsxse1
- growth
- preparing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/006—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/063—Gp II-IV-VI compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/064—Gp II-VI compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/169—Vacuum deposition, e.g. including molecular beam epitaxy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/967—Semiconductor on specified insulator
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Light Receiving Elements (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Bipolar Transistors (AREA)
Abstract
L'invention concerne un procédé pour préparer des couches épitaxiales 14 simples et multiples en séléniure de plomb à phase unique (Pb)a (Sx Se 1-x )1-a , avec 0 <= x <= 1 et a = 0,500 +- 0,003, sur un support en chlorure de baryum avec maintien près de l'équilibre thermodynamique, avec sublimation simultanée de l'alliage de plomb et d'un dopant, pour former au moins une couche epitaxiale ayant des propriétés électriques et optiques prédéterminées et uniformes.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/801,431 US4154631A (en) | 1977-05-27 | 1977-05-27 | Equilibrium growth technique for preparing PbSx Se1-x epilayers |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2402476A1 true FR2402476A1 (fr) | 1979-04-06 |
FR2402476B1 FR2402476B1 (fr) | 1985-03-01 |
Family
ID=25181074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7815873A Expired FR2402476B1 (fr) | 1977-05-27 | 1978-05-26 | Procede pour preparer des couches epitaxiales en pbsxse1-x par croissance a l'equilibre |
Country Status (10)
Country | Link |
---|---|
US (1) | US4154631A (fr) |
JP (1) | JPS5416977A (fr) |
BE (1) | BE867418A (fr) |
CA (1) | CA1152620A (fr) |
DE (1) | DE2822963A1 (fr) |
FR (1) | FR2402476B1 (fr) |
GB (3) | GB1604966A (fr) |
IT (1) | IT1105039B (fr) |
NL (1) | NL7805623A (fr) |
SE (1) | SE438221B (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2402274A1 (fr) * | 1977-08-29 | 1979-03-30 | Rca Corp | Milieu d'enregistrement optique d'informations, destine a etre utilise avec un faisceau laser d'enregistrement |
FR2557562A1 (fr) * | 1983-12-29 | 1985-07-05 | Menn Roger | Procede de fabrication de couches non conductrices a variation de composition atomique |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4227948A (en) * | 1977-12-27 | 1980-10-14 | The United States Of America As Represented By The Secretary Of The Navy | Growth technique for preparing graded gap semiconductors and devices |
US4263604A (en) * | 1977-12-27 | 1981-04-21 | The United States Of America As Represented By The Secretary Of The Navy | Graded gap semiconductor detector |
US4371232A (en) * | 1977-12-27 | 1983-02-01 | The United States Of America As Represented By The Secretary Of The Navy | Graded gap semiconductor optical device |
US4330932A (en) * | 1978-07-20 | 1982-05-25 | The United States Of America As Represented By The Secretary Of The Navy | Process for preparing isolated junctions in thin-film semiconductors utilizing shadow masked deposition to form graded-side mesas |
JPS59156996A (ja) * | 1983-02-23 | 1984-09-06 | Koito Mfg Co Ltd | 化合物結晶膜の製造方法とその装置 |
JPS60251195A (ja) * | 1984-05-26 | 1985-12-11 | Koito Mfg Co Ltd | 化合物結晶膜の製造方法とその装置 |
US4743949A (en) * | 1984-07-10 | 1988-05-10 | Hans Zogg | Infrared optical-electronic device |
US4709655A (en) * | 1985-12-03 | 1987-12-01 | Varian Associates, Inc. | Chemical vapor deposition apparatus |
KR880010481A (ko) * | 1987-02-21 | 1988-10-10 | 강진구 | 액상 박막 결정 성장방법 및 장치 |
KR910006093B1 (ko) * | 1988-06-30 | 1991-08-12 | 삼성전자 주식회사 | 반도체 장치의 제조방법 |
US4853339A (en) * | 1988-07-27 | 1989-08-01 | The United States Of America As Represented By The Secretary Of The Navy | Method of sensitizing Pb-salt epitaxial films for schottky diodes |
US4900373A (en) * | 1988-07-27 | 1990-02-13 | The United States Of America As Represented By The Secretary Of The Navy | Sensitization pretreatment of Pb-salt epitaxial films for schottky diodes by sulfur vapor exposure |
US4870027A (en) * | 1988-07-27 | 1989-09-26 | The United States Of America As Represented By The Secretary Of The Navy | Sensitization pretreatment of Pb-salt epitaxial films for Schottky diodes by sulfur vapor exposure |
AU4695096A (en) * | 1995-01-06 | 1996-07-24 | National Aeronautics And Space Administration - Nasa | Minority carrier device |
JP2002270346A (ja) * | 2001-03-09 | 2002-09-20 | Mitsubishi Heavy Ind Ltd | 加熱装置及びその製造方法並びに被膜形成装置 |
JP4509433B2 (ja) * | 2001-07-12 | 2010-07-21 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
US7442413B2 (en) * | 2005-11-18 | 2008-10-28 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
EA200701428A1 (ru) * | 2007-06-11 | 2008-02-28 | Ариф Мирджалалович Пашаев | СПОСОБ РЕГУЛИРОВАНИЯ КОНЦЕНТРАЦИИ НОСИТЕЛЕЙ ЗАРЯДА В ЭПИТАКСИАЛЬНЫХ СЛОЯХ PbSnSe |
US8778081B2 (en) | 2012-01-04 | 2014-07-15 | Colorado State University Research Foundation | Process and hardware for deposition of complex thin-film alloys over large areas |
US10109754B2 (en) | 2012-12-13 | 2018-10-23 | The Board Of Regents Of The University Of Oklahoma | Photovoltaic lead-salt detectors |
WO2015047492A2 (fr) * | 2013-06-20 | 2015-04-02 | The Board Of Regents Of The University Of Oklahoma | Détecteurs photovoltaïques à sel de plomb |
US9887309B2 (en) | 2012-12-13 | 2018-02-06 | The Board of Regents of the University of Okalahoma | Photovoltaic lead-salt semiconductor detectors |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1295195B (de) * | 1961-12-26 | 1969-05-14 | Minnesota Mining & Mfg | Thermoelektrisches Halbleitermaterial |
US3716424A (en) * | 1970-04-02 | 1973-02-13 | Us Navy | Method of preparation of lead sulfide pn junction diodes |
US3793070A (en) * | 1971-06-01 | 1974-02-19 | Us Navy | Method of varying the carrier concentration of lead-tin sulfide epitaxial films |
US3961998A (en) * | 1975-04-09 | 1976-06-08 | The United States Of America As Represented By The Secretary Of The Navy | Vacuum deposition method for fabricating an epitaxial pbsnte rectifying metal semiconductor contact photodetector |
US4063974A (en) * | 1975-11-14 | 1977-12-20 | Hughes Aircraft Company | Planar reactive evaporation method for the deposition of compound semiconducting films |
-
1977
- 1977-05-27 US US05/801,431 patent/US4154631A/en not_active Expired - Lifetime
-
1978
- 1978-05-17 CA CA000303583A patent/CA1152620A/fr not_active Expired
- 1978-05-17 SE SE7805652A patent/SE438221B/sv unknown
- 1978-05-24 NL NL7805623A patent/NL7805623A/xx not_active Application Discontinuation
- 1978-05-24 BE BE187989A patent/BE867418A/fr not_active IP Right Cessation
- 1978-05-26 FR FR7815873A patent/FR2402476B1/fr not_active Expired
- 1978-05-26 JP JP6321178A patent/JPS5416977A/ja active Pending
- 1978-05-26 DE DE19782822963 patent/DE2822963A1/de not_active Withdrawn
- 1978-05-27 GB GB1140/81A patent/GB1604966A/en not_active Expired
- 1978-05-27 GB GB20213/78A patent/GB1604965A/en not_active Expired
- 1978-05-27 GB GB1412/81A patent/GB1604967A/en not_active Expired
- 1978-05-29 IT IT49585/78A patent/IT1105039B/it active
Non-Patent Citations (2)
Title |
---|
EXBK/75 * |
EXBK/76 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2402274A1 (fr) * | 1977-08-29 | 1979-03-30 | Rca Corp | Milieu d'enregistrement optique d'informations, destine a etre utilise avec un faisceau laser d'enregistrement |
FR2557562A1 (fr) * | 1983-12-29 | 1985-07-05 | Menn Roger | Procede de fabrication de couches non conductrices a variation de composition atomique |
Also Published As
Publication number | Publication date |
---|---|
SE438221B (sv) | 1985-04-01 |
IT1105039B (it) | 1985-10-28 |
IT7849585A0 (it) | 1978-05-29 |
NL7805623A (nl) | 1978-11-29 |
SE7805652L (sv) | 1978-11-28 |
US4154631A (en) | 1979-05-15 |
GB1604967A (en) | 1981-12-16 |
BE867418A (fr) | 1978-09-18 |
DE2822963A1 (de) | 1978-11-30 |
GB1604966A (en) | 1981-12-16 |
FR2402476B1 (fr) | 1985-03-01 |
GB1604965A (en) | 1981-12-16 |
CA1152620A (fr) | 1983-08-23 |
JPS5416977A (en) | 1979-02-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |