GB1400593A - Growing crystals from a melt - Google Patents

Growing crystals from a melt

Info

Publication number
GB1400593A
GB1400593A GB4480472A GB4480472A GB1400593A GB 1400593 A GB1400593 A GB 1400593A GB 4480472 A GB4480472 A GB 4480472A GB 4480472 A GB4480472 A GB 4480472A GB 1400593 A GB1400593 A GB 1400593A
Authority
GB
United Kingdom
Prior art keywords
crystal
melt
radiation
mirror
reflected radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4480472A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1400593A publication Critical patent/GB1400593A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1400593 Controlling growing crystals PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 28 Sept 1972 [1 Oct 1971] 44804/72 Heading B1S The diameter of a growing single crystal as it is drawn from a melt by a seed crystal is monitored by an optical device which comprises means for irradiating the surface of the melt with a narrow light beam, means for receiving the reflected radiation and means for comparing the reflected radiation with that of the desired reflected radiation. In the device the direction of the incident radiation and the reflected radiation encloses angles of at most 10‹ with the direction of drawing of the crystal and the incident beam is directed onto that area of the surface of the melt which is curved due to the presence of the crystal but is sufficiently far remote from the edge of the growing part of the crystal to ensure that in that area the surface of the melt deviates from a horizontal position by at most 5‹. The radiation may be produced by an incondescent lamp, an arc lamp or laser. The crystal may be germanium, silicon, or a semiconductor of a material of groups III-V e.g. a garnet or spinel material. As shown in the Figure a crystal 5 on seed 4, attached to drawing rod 3 is grown from a melt 2 contained in a crucible 1 heated by high frequency induction by coil 30 controlled by generator 31, and the diameter of the crystal is controlled by adjusting the high frequency current in the coil 30 by the optical device shown (11 to 21), with the output from photoelectric cells 25 and 26, being amplified by amplifiers 33 and 34 and controller 32. The optical device shown consists of a helium-neon laser 11, periodically interrupted by a chopper disc 12, a divergent lens 14, a convergent lens 20, a mirror 21 and a scanning point 9 on the surface 7 of the melt. The reflected beam is focused by mirror 21 and lens 26 through transparent plates 18 and 19 and mirror 16 onto the photodiodes.25 and 26 from which the desired comparison is made in controller 32.
GB4480472A 1971-10-01 1972-09-28 Growing crystals from a melt Expired GB1400593A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712149093 DE2149093C3 (en) 1971-10-01 1971-10-01 Device for growing single crystals by pulling them from a melt

Publications (1)

Publication Number Publication Date
GB1400593A true GB1400593A (en) 1975-07-16

Family

ID=5821216

Family Applications (2)

Application Number Title Priority Date Filing Date
GB4480472A Expired GB1400593A (en) 1971-10-01 1972-09-28 Growing crystals from a melt
GB4480572A Expired GB1405447A (en) 1971-10-01 1972-09-28 Crystal growing apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB4480572A Expired GB1405447A (en) 1971-10-01 1972-09-28 Crystal growing apparatus

Country Status (10)

Country Link
JP (2) JPS533757B2 (en)
AU (2) AU4716772A (en)
BE (2) BE789554A (en)
CA (1) CA997255A (en)
CH (2) CH558206A (en)
DE (1) DE2149093C3 (en)
FR (2) FR2154777B1 (en)
GB (2) GB1400593A (en)
IT (2) IT967978B (en)
NL (2) NL7213119A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115178756A (en) * 2022-07-15 2022-10-14 中国科学院重庆绿色智能技术研究院 High-resolution imaging device and method for transient molten pool characteristic during selective laser melting
CN115613121A (en) * 2022-11-18 2023-01-17 浙江晶盛机电股份有限公司 Crystal production equipment and seed crystal breaking method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612863B2 (en) * 1973-07-11 1981-03-25
JPS6033299A (en) * 1983-07-29 1985-02-20 Toshiba Corp Apparatus for preparing single crystal
JPS63307186A (en) * 1987-06-05 1988-12-14 Shin Etsu Handotai Co Ltd Crystal diameter controller in crystallization
FI87660C (en) * 1988-03-03 1993-02-10 Leybold Ag Method and apparatus for drawing monocrystals
FI911857A (en) * 1990-04-27 1991-10-28 Nippon Kokan Kk FOERFARANDE OCH APPARAT FOER KONTROLL AV DIAMETERN HOS EN ENSKILD SILIKONKRISTALL.
DE4301072B4 (en) * 1993-01-16 2006-08-24 Crystal Growing Systems Gmbh Process for pulling single crystals from a melt

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115178756A (en) * 2022-07-15 2022-10-14 中国科学院重庆绿色智能技术研究院 High-resolution imaging device and method for transient molten pool characteristic during selective laser melting
CN115613121A (en) * 2022-11-18 2023-01-17 浙江晶盛机电股份有限公司 Crystal production equipment and seed crystal breaking method

Also Published As

Publication number Publication date
FR2154777A1 (en) 1973-05-11
IT967977B (en) 1974-03-11
DE2149093B2 (en) 1974-12-05
BE789553A (en) 1973-03-29
FR2154776A1 (en) 1973-05-11
NL7213118A (en) 1973-04-03
JPS4842980A (en) 1973-06-21
FR2154777B1 (en) 1976-08-20
CH559062A5 (en) 1975-02-28
AU4716772A (en) 1974-04-04
IT967978B (en) 1974-03-11
NL7213119A (en) 1973-04-03
GB1405447A (en) 1975-09-10
AU4716872A (en) 1974-04-04
JPS4842981A (en) 1973-06-21
FR2154776B1 (en) 1976-08-20
JPS533757B2 (en) 1978-02-09
CA997255A (en) 1976-09-21
DE2149093A1 (en) 1973-04-05
JPS5238512B2 (en) 1977-09-29
BE789554A (en) 1973-03-29
CH558206A (en) 1975-01-31
DE2149093C3 (en) 1975-07-24

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee