GB1387166A - Electrically conductive layers upon high-ohmic substrates - Google Patents

Electrically conductive layers upon high-ohmic substrates

Info

Publication number
GB1387166A
GB1387166A GB4281072A GB4281072A GB1387166A GB 1387166 A GB1387166 A GB 1387166A GB 4281072 A GB4281072 A GB 4281072A GB 4281072 A GB4281072 A GB 4281072A GB 1387166 A GB1387166 A GB 1387166A
Authority
GB
United Kingdom
Prior art keywords
particles
substrate
islands
low energy
few
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4281072A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712146662 external-priority patent/DE2146662C3/de
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1387166A publication Critical patent/GB1387166A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Thermistors And Varistors (AREA)
GB4281072A 1971-09-17 1972-09-15 Electrically conductive layers upon high-ohmic substrates Expired GB1387166A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712146662 DE2146662C3 (de) 1971-09-17 Verfahren zur Herstellung einer elektrisch leitfähigen Schicht

Publications (1)

Publication Number Publication Date
GB1387166A true GB1387166A (en) 1975-03-12

Family

ID=5819937

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4281072A Expired GB1387166A (en) 1971-09-17 1972-09-15 Electrically conductive layers upon high-ohmic substrates

Country Status (12)

Country Link
US (1) US3818413A (fr)
JP (1) JPS4839180A (fr)
AT (1) AT321411B (fr)
BE (1) BE788894A (fr)
CA (1) CA968864A (fr)
CH (1) CH566063A5 (fr)
FR (1) FR2152942B1 (fr)
GB (1) GB1387166A (fr)
IT (1) IT967539B (fr)
LU (1) LU66097A1 (fr)
NL (1) NL7212362A (fr)
SE (1) SE381530B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898607A (en) * 1974-02-28 1975-08-05 Motorola Inc High value vertical resistors by ion implantation and method for making same
US4318072A (en) * 1979-09-04 1982-03-02 Vishay Intertechnology, Inc. Precision resistor with improved temperature characteristics
DE3138960A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung elektrisch leitender schichten
JPS59162580A (ja) * 1983-03-08 1984-09-13 Fuji Photo Film Co Ltd 電子写真装置用プロセスヘツド
US6373118B1 (en) * 1999-08-11 2002-04-16 Lewyn Consulting, Inc. High-value integrated circuit resistor
CN110824137B (zh) * 2019-10-10 2022-03-11 中国建筑材料科学研究总院有限公司 低辐射玻璃中银膜在衬底上结晶有序性的预测方法及装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999339A (en) * 1956-12-07 1961-09-12 Bansch & Lomb Inc Method of providing an electrically conductive surface
US3287161A (en) * 1962-10-01 1966-11-22 Xerox Corp Method for forming a thin film resistor
US3380156A (en) * 1965-11-15 1968-04-30 Trw Inc Method of fabricating thin film resistors
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US3585088A (en) * 1968-10-18 1971-06-15 Ibm Methods of producing single crystals on supporting substrates

Also Published As

Publication number Publication date
NL7212362A (fr) 1973-03-20
AT321411B (de) 1975-03-25
BE788894A (fr) 1973-01-02
CH566063A5 (fr) 1975-08-29
LU66097A1 (fr) 1973-01-17
JPS4839180A (fr) 1973-06-08
DE2146662B2 (de) 1976-04-08
DE2146662A1 (de) 1973-03-22
IT967539B (it) 1974-03-11
SE381530B (sv) 1975-12-08
US3818413A (en) 1974-06-18
CA968864A (en) 1975-06-03
FR2152942B1 (fr) 1976-08-13
FR2152942A1 (fr) 1973-04-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee