AT321411B - Elektrischer Schichtwiderstand - Google Patents

Elektrischer Schichtwiderstand

Info

Publication number
AT321411B
AT321411B AT693072A AT693072A AT321411B AT 321411 B AT321411 B AT 321411B AT 693072 A AT693072 A AT 693072A AT 693072 A AT693072 A AT 693072A AT 321411 B AT321411 B AT 321411B
Authority
AT
Austria
Prior art keywords
sheet resistance
electrical sheet
electrical
resistance
sheet
Prior art date
Application number
AT693072A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712146662 external-priority patent/DE2146662C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT321411B publication Critical patent/AT321411B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Physical Vapour Deposition (AREA)
  • Thermistors And Varistors (AREA)
  • Electrodes Of Semiconductors (AREA)
AT693072A 1971-09-17 1972-08-10 Elektrischer Schichtwiderstand AT321411B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712146662 DE2146662C3 (de) 1971-09-17 Verfahren zur Herstellung einer elektrisch leitfähigen Schicht

Publications (1)

Publication Number Publication Date
AT321411B true AT321411B (de) 1975-03-25

Family

ID=5819937

Family Applications (1)

Application Number Title Priority Date Filing Date
AT693072A AT321411B (de) 1971-09-17 1972-08-10 Elektrischer Schichtwiderstand

Country Status (12)

Country Link
US (1) US3818413A (de)
JP (1) JPS4839180A (de)
AT (1) AT321411B (de)
BE (1) BE788894A (de)
CA (1) CA968864A (de)
CH (1) CH566063A5 (de)
FR (1) FR2152942B1 (de)
GB (1) GB1387166A (de)
IT (1) IT967539B (de)
LU (1) LU66097A1 (de)
NL (1) NL7212362A (de)
SE (1) SE381530B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898607A (en) * 1974-02-28 1975-08-05 Motorola Inc High value vertical resistors by ion implantation and method for making same
US4318072A (en) * 1979-09-04 1982-03-02 Vishay Intertechnology, Inc. Precision resistor with improved temperature characteristics
DE3138960A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung elektrisch leitender schichten
JPS59162580A (ja) * 1983-03-08 1984-09-13 Fuji Photo Film Co Ltd 電子写真装置用プロセスヘツド
US6373118B1 (en) * 1999-08-11 2002-04-16 Lewyn Consulting, Inc. High-value integrated circuit resistor
CN110824137B (zh) * 2019-10-10 2022-03-11 中国建筑材料科学研究总院有限公司 低辐射玻璃中银膜在衬底上结晶有序性的预测方法及装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999339A (en) * 1956-12-07 1961-09-12 Bansch & Lomb Inc Method of providing an electrically conductive surface
US3287161A (en) * 1962-10-01 1966-11-22 Xerox Corp Method for forming a thin film resistor
US3380156A (en) * 1965-11-15 1968-04-30 Trw Inc Method of fabricating thin film resistors
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US3585088A (en) * 1968-10-18 1971-06-15 Ibm Methods of producing single crystals on supporting substrates

Also Published As

Publication number Publication date
US3818413A (en) 1974-06-18
DE2146662A1 (de) 1973-03-22
NL7212362A (de) 1973-03-20
CH566063A5 (de) 1975-08-29
IT967539B (it) 1974-03-11
BE788894A (fr) 1973-01-02
FR2152942A1 (de) 1973-04-27
LU66097A1 (de) 1973-01-17
SE381530B (sv) 1975-12-08
JPS4839180A (de) 1973-06-08
CA968864A (en) 1975-06-03
GB1387166A (en) 1975-03-12
DE2146662B2 (de) 1976-04-08
FR2152942B1 (de) 1976-08-13

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee