US3818413A - Film resistor and method of making - Google Patents

Film resistor and method of making Download PDF

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Publication number
US3818413A
US3818413A US00285933A US28593372A US3818413A US 3818413 A US3818413 A US 3818413A US 00285933 A US00285933 A US 00285933A US 28593372 A US28593372 A US 28593372A US 3818413 A US3818413 A US 3818413A
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US
United States
Prior art keywords
islands
supporting base
areas
layer
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00285933A
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English (en)
Inventor
E Krimmel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712146662 external-priority patent/DE2146662C3/de
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of US3818413A publication Critical patent/US3818413A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Definitions

  • the apparatus for use in practicing the method of the invention may be the device described in Zeitschrift Fur Angewandte Physik, Vol. 31 (1971), Pages 51 and following.
  • An electrical resistor according to claim 5 wherein the surface of said areas is essentially free from individual particles of the material or materials, or malands have dimensions in the order of one nanometer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Thermistors And Varistors (AREA)
US00285933A 1971-09-17 1972-09-01 Film resistor and method of making Expired - Lifetime US3818413A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712146662 DE2146662C3 (de) 1971-09-17 Verfahren zur Herstellung einer elektrisch leitfähigen Schicht

Publications (1)

Publication Number Publication Date
US3818413A true US3818413A (en) 1974-06-18

Family

ID=5819937

Family Applications (1)

Application Number Title Priority Date Filing Date
US00285933A Expired - Lifetime US3818413A (en) 1971-09-17 1972-09-01 Film resistor and method of making

Country Status (12)

Country Link
US (1) US3818413A (fr)
JP (1) JPS4839180A (fr)
AT (1) AT321411B (fr)
BE (1) BE788894A (fr)
CA (1) CA968864A (fr)
CH (1) CH566063A5 (fr)
FR (1) FR2152942B1 (fr)
GB (1) GB1387166A (fr)
IT (1) IT967539B (fr)
LU (1) LU66097A1 (fr)
NL (1) NL7212362A (fr)
SE (1) SE381530B (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898607A (en) * 1974-02-28 1975-08-05 Motorola Inc High value vertical resistors by ion implantation and method for making same
US4318072A (en) * 1979-09-04 1982-03-02 Vishay Intertechnology, Inc. Precision resistor with improved temperature characteristics
US4466839A (en) * 1981-09-30 1984-08-21 Siemens Aktiengesellschaft Implantation of an insulative layer
US6373118B1 (en) * 1999-08-11 2002-04-16 Lewyn Consulting, Inc. High-value integrated circuit resistor
CN110824137A (zh) * 2019-10-10 2020-02-21 中国建筑材料科学研究总院有限公司 低辐射玻璃中银膜在衬底上结晶有序性的预测方法及装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162580A (ja) * 1983-03-08 1984-09-13 Fuji Photo Film Co Ltd 電子写真装置用プロセスヘツド

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999339A (en) * 1956-12-07 1961-09-12 Bansch & Lomb Inc Method of providing an electrically conductive surface
US3287161A (en) * 1962-10-01 1966-11-22 Xerox Corp Method for forming a thin film resistor
US3380156A (en) * 1965-11-15 1968-04-30 Trw Inc Method of fabricating thin film resistors
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US3585088A (en) * 1968-10-18 1971-06-15 Ibm Methods of producing single crystals on supporting substrates

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999339A (en) * 1956-12-07 1961-09-12 Bansch & Lomb Inc Method of providing an electrically conductive surface
US3287161A (en) * 1962-10-01 1966-11-22 Xerox Corp Method for forming a thin film resistor
US3380156A (en) * 1965-11-15 1968-04-30 Trw Inc Method of fabricating thin film resistors
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US3585088A (en) * 1968-10-18 1971-06-15 Ibm Methods of producing single crystals on supporting substrates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Krimmel, Properties of Selfionirradiated Thin Films, pp. 141 150; 7 71. *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898607A (en) * 1974-02-28 1975-08-05 Motorola Inc High value vertical resistors by ion implantation and method for making same
US4318072A (en) * 1979-09-04 1982-03-02 Vishay Intertechnology, Inc. Precision resistor with improved temperature characteristics
US4466839A (en) * 1981-09-30 1984-08-21 Siemens Aktiengesellschaft Implantation of an insulative layer
US6373118B1 (en) * 1999-08-11 2002-04-16 Lewyn Consulting, Inc. High-value integrated circuit resistor
CN110824137A (zh) * 2019-10-10 2020-02-21 中国建筑材料科学研究总院有限公司 低辐射玻璃中银膜在衬底上结晶有序性的预测方法及装置
CN110824137B (zh) * 2019-10-10 2022-03-11 中国建筑材料科学研究总院有限公司 低辐射玻璃中银膜在衬底上结晶有序性的预测方法及装置

Also Published As

Publication number Publication date
NL7212362A (fr) 1973-03-20
AT321411B (de) 1975-03-25
BE788894A (fr) 1973-01-02
CH566063A5 (fr) 1975-08-29
GB1387166A (en) 1975-03-12
LU66097A1 (fr) 1973-01-17
JPS4839180A (fr) 1973-06-08
DE2146662B2 (de) 1976-04-08
DE2146662A1 (de) 1973-03-22
IT967539B (it) 1974-03-11
SE381530B (sv) 1975-12-08
CA968864A (en) 1975-06-03
FR2152942B1 (fr) 1976-08-13
FR2152942A1 (fr) 1973-04-27

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