GB1344399A - Measuring the charge density of an insulating layer on a semi conductor substrate - Google Patents

Measuring the charge density of an insulating layer on a semi conductor substrate

Info

Publication number
GB1344399A
GB1344399A GB4127472A GB4127472A GB1344399A GB 1344399 A GB1344399 A GB 1344399A GB 4127472 A GB4127472 A GB 4127472A GB 4127472 A GB4127472 A GB 4127472A GB 1344399 A GB1344399 A GB 1344399A
Authority
GB
United Kingdom
Prior art keywords
source
charge density
potential
fet
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4127472A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1344399A publication Critical patent/GB1344399A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2621Circuits therefor for testing field effect transistors, i.e. FET's
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2637Circuits therefor for testing other individual devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316Testing of analog circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
GB4127472A 1971-11-24 1972-09-06 Measuring the charge density of an insulating layer on a semi conductor substrate Expired GB1344399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20167771A 1971-11-24 1971-11-24

Publications (1)

Publication Number Publication Date
GB1344399A true GB1344399A (en) 1974-01-23

Family

ID=22746824

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4127472A Expired GB1344399A (en) 1971-11-24 1972-09-06 Measuring the charge density of an insulating layer on a semi conductor substrate

Country Status (7)

Country Link
US (1) US3750018A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5138223B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA958074A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2247162C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2160829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1344399A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT967703B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4223238A (en) * 1978-08-17 1980-09-16 Motorola, Inc. Integrated circuit substrate charge pump
US4237379A (en) * 1979-06-22 1980-12-02 Rca Corporation Method for inspecting electrical devices
JPS57186351A (en) * 1981-05-12 1982-11-16 Fujitsu Ltd Semiconductor device
US4435652A (en) 1981-05-26 1984-03-06 Honeywell, Inc. Threshold voltage control network for integrated circuit field-effect trransistors
US4567430A (en) * 1981-09-08 1986-01-28 Recognition Equipment Incorporated Semiconductor device for automation of integrated photoarray characterization
WO1988002123A1 (en) * 1986-09-17 1988-03-24 The General Electric Company, P.L.C. Integrated circuits
FR2617979B1 (fr) * 1987-07-10 1989-11-10 Thomson Semiconducteurs Dispositif de detection de la depassivation d'un circuit integre
US4942357A (en) * 1989-08-07 1990-07-17 Eastman Kodak Company Method of testing a charge-coupled device
CN115877164B (zh) * 2023-03-03 2023-05-12 长鑫存储技术有限公司 可动离子电荷面密度的测试方法及装置、电子设备和介质

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3648170A (en) * 1969-08-08 1972-03-07 Bell Telephone Labor Inc Measurement of field effect transistor pinch-off voltage

Also Published As

Publication number Publication date
IT967703B (it) 1974-03-11
DE2247162B2 (de) 1980-03-20
CA958074A (en) 1974-11-19
DE2247162A1 (de) 1973-05-30
FR2160829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-04-23
JPS5138223B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-20
JPS4860877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-25
DE2247162C3 (de) 1980-10-30
FR2160829A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-06
US3750018A (en) 1973-07-31

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee