IT967703B - Procedimento per misurare la den sita delle cariche in pellicole di passivazione di circuiti inte grati - Google Patents

Procedimento per misurare la den sita delle cariche in pellicole di passivazione di circuiti inte grati

Info

Publication number
IT967703B
IT967703B IT29530/72A IT2953072A IT967703B IT 967703 B IT967703 B IT 967703B IT 29530/72 A IT29530/72 A IT 29530/72A IT 2953072 A IT2953072 A IT 2953072A IT 967703 B IT967703 B IT 967703B
Authority
IT
Italy
Prior art keywords
charges
procedure
measuring
integrated circuits
passivation film
Prior art date
Application number
IT29530/72A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT967703B publication Critical patent/IT967703B/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2621Circuits therefor for testing field effect transistors, i.e. FET's
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2637Circuits therefor for testing other individual devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316Testing of analog circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
IT29530/72A 1971-11-24 1972-09-22 Procedimento per misurare la den sita delle cariche in pellicole di passivazione di circuiti inte grati IT967703B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20167771A 1971-11-24 1971-11-24

Publications (1)

Publication Number Publication Date
IT967703B true IT967703B (it) 1974-03-11

Family

ID=22746824

Family Applications (1)

Application Number Title Priority Date Filing Date
IT29530/72A IT967703B (it) 1971-11-24 1972-09-22 Procedimento per misurare la den sita delle cariche in pellicole di passivazione di circuiti inte grati

Country Status (7)

Country Link
US (1) US3750018A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5138223B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA958074A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2247162C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2160829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1344399A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT967703B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4223238A (en) * 1978-08-17 1980-09-16 Motorola, Inc. Integrated circuit substrate charge pump
US4237379A (en) * 1979-06-22 1980-12-02 Rca Corporation Method for inspecting electrical devices
JPS57186351A (en) * 1981-05-12 1982-11-16 Fujitsu Ltd Semiconductor device
US4435652A (en) 1981-05-26 1984-03-06 Honeywell, Inc. Threshold voltage control network for integrated circuit field-effect trransistors
US4567430A (en) * 1981-09-08 1986-01-28 Recognition Equipment Incorporated Semiconductor device for automation of integrated photoarray characterization
WO1988002123A1 (en) * 1986-09-17 1988-03-24 The General Electric Company, P.L.C. Integrated circuits
FR2617979B1 (fr) * 1987-07-10 1989-11-10 Thomson Semiconducteurs Dispositif de detection de la depassivation d'un circuit integre
US4942357A (en) * 1989-08-07 1990-07-17 Eastman Kodak Company Method of testing a charge-coupled device
CN115877164B (zh) * 2023-03-03 2023-05-12 长鑫存储技术有限公司 可动离子电荷面密度的测试方法及装置、电子设备和介质

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3648170A (en) * 1969-08-08 1972-03-07 Bell Telephone Labor Inc Measurement of field effect transistor pinch-off voltage

Also Published As

Publication number Publication date
DE2247162B2 (de) 1980-03-20
CA958074A (en) 1974-11-19
DE2247162A1 (de) 1973-05-30
FR2160829B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-04-23
JPS5138223B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-20
JPS4860877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-25
DE2247162C3 (de) 1980-10-30
FR2160829A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-06
GB1344399A (en) 1974-01-23
US3750018A (en) 1973-07-31

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