IT952930B - Procedimento per la fabbricazione di circuiti integrati al silicio - Google Patents

Procedimento per la fabbricazione di circuiti integrati al silicio

Info

Publication number
IT952930B
IT952930B IT6772972A IT6772972A IT952930B IT 952930 B IT952930 B IT 952930B IT 6772972 A IT6772972 A IT 6772972A IT 6772972 A IT6772972 A IT 6772972A IT 952930 B IT952930 B IT 952930B
Authority
IT
Italy
Prior art keywords
procedure
manufacture
integrated circuits
silicon integrated
silicon
Prior art date
Application number
IT6772972A
Other languages
English (en)
Inventor
J Cadelec
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of IT952930B publication Critical patent/IT952930B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/221Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities of killers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
IT6772972A 1971-03-09 1972-03-08 Procedimento per la fabbricazione di circuiti integrati al silicio IT952930B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7108025A FR2128164B1 (it) 1971-03-09 1971-03-09

Publications (1)

Publication Number Publication Date
IT952930B true IT952930B (it) 1973-07-30

Family

ID=9073164

Family Applications (1)

Application Number Title Priority Date Filing Date
IT6772972A IT952930B (it) 1971-03-09 1972-03-08 Procedimento per la fabbricazione di circuiti integrati al silicio

Country Status (4)

Country Link
BE (1) BE780423A (it)
FR (1) FR2128164B1 (it)
GB (1) GB1380143A (it)
IT (1) IT952930B (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262336A (en) * 1986-03-21 1993-11-16 Advanced Power Technology, Inc. IGBT process to produce platinum lifetime control
EP0675527B1 (en) * 1994-03-30 1999-11-10 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno Manufacturing process for obtaining bipolar transistors with controlled storage time

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590471A (en) * 1969-02-04 1971-07-06 Bell Telephone Labor Inc Fabrication of insulated gate field-effect transistors involving ion implantation

Also Published As

Publication number Publication date
BE780423A (fr) 1972-07-03
GB1380143A (it) 1975-01-08
FR2128164A1 (it) 1972-10-20
FR2128164B1 (it) 1973-11-30

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