IT976005B - Procedimento per la fabbricazione di dispositivi semiconduttori - Google Patents
Procedimento per la fabbricazione di dispositivi semiconduttoriInfo
- Publication number
- IT976005B IT976005B IT7087972A IT7087972A IT976005B IT 976005 B IT976005 B IT 976005B IT 7087972 A IT7087972 A IT 7087972A IT 7087972 A IT7087972 A IT 7087972A IT 976005 B IT976005 B IT 976005B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- manufacturing
- semiconductor devices
- semiconductor
- devices
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5776971 | 1971-12-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT976005B true IT976005B (it) | 1974-08-20 |
Family
ID=10479987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT7087972A IT976005B (it) | 1971-12-13 | 1972-12-11 | Procedimento per la fabbricazione di dispositivi semiconduttori |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS4873079A (it) |
CA (1) | CA970080A (it) |
DE (1) | DE2258057A1 (it) |
FR (1) | FR2163559A1 (it) |
GB (1) | GB1336626A (it) |
IT (1) | IT976005B (it) |
NL (1) | NL7216663A (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4460831A (en) * | 1981-11-30 | 1984-07-17 | Thermo Electron Corporation | Laser stimulated high current density photoelectron generator and method of manufacture |
-
1971
- 1971-12-13 GB GB1336626D patent/GB1336626A/en not_active Expired
-
1972
- 1972-11-27 DE DE19722258057 patent/DE2258057A1/de active Pending
- 1972-12-08 NL NL7216663A patent/NL7216663A/xx unknown
- 1972-12-09 JP JP12306372A patent/JPS4873079A/ja active Pending
- 1972-12-11 IT IT7087972A patent/IT976005B/it active
- 1972-12-12 CA CA158,640A patent/CA970080A/en not_active Expired
- 1972-12-13 FR FR7244330A patent/FR2163559A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB1336626A (en) | 1973-11-07 |
NL7216663A (it) | 1973-06-15 |
DE2258057A1 (de) | 1973-06-20 |
CA970080A (en) | 1975-06-24 |
FR2163559A1 (it) | 1973-07-27 |
JPS4873079A (it) | 1973-10-02 |
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