GB1300186A - Method for passivating mesa pn junction structures - Google Patents

Method for passivating mesa pn junction structures

Info

Publication number
GB1300186A
GB1300186A GB29961/71A GB2996171A GB1300186A GB 1300186 A GB1300186 A GB 1300186A GB 29961/71 A GB29961/71 A GB 29961/71A GB 2996171 A GB2996171 A GB 2996171A GB 1300186 A GB1300186 A GB 1300186A
Authority
GB
United Kingdom
Prior art keywords
mesa
silicon
layer
silicon nitride
passivating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB29961/71A
Other languages
English (en)
Inventor
Douglas Lee Elgan
Michael Francis Flahie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of GB1300186A publication Critical patent/GB1300186A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F3/00Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/72Gated amplifiers, i.e. amplifiers which are rendered operative or inoperative by means of a control signal
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
GB29961/71A 1970-07-22 1971-06-25 Method for passivating mesa pn junction structures Expired GB1300186A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5717870A 1970-07-22 1970-07-22

Publications (1)

Publication Number Publication Date
GB1300186A true GB1300186A (en) 1972-12-20

Family

ID=22008987

Family Applications (1)

Application Number Title Priority Date Filing Date
GB29961/71A Expired GB1300186A (en) 1970-07-22 1971-06-25 Method for passivating mesa pn junction structures

Country Status (5)

Country Link
BE (1) BE770277A (enExample)
DE (1) DE2136239A1 (enExample)
FR (1) FR2099527B1 (enExample)
GB (1) GB1300186A (enExample)
NL (1) NL7110058A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2119568A (en) * 1982-04-26 1983-11-16 Raytheon Co Method of forming a protective layer in a semiconductor structure
GB2192093A (en) * 1986-06-17 1987-12-31 Plessey Co Plc A local oxidation of silicon process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2466859A1 (fr) * 1979-10-05 1981-04-10 Thomson Csf Procede de sillonnage et de glassivation par masquage au nitrure de silicium et composants semi-conducteurs obtenus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2119568A (en) * 1982-04-26 1983-11-16 Raytheon Co Method of forming a protective layer in a semiconductor structure
GB2192093A (en) * 1986-06-17 1987-12-31 Plessey Co Plc A local oxidation of silicon process
GB2192093B (en) * 1986-06-17 1989-12-13 Plessey Co Plc A local oxidation of silicon process

Also Published As

Publication number Publication date
BE770277A (fr) 1972-01-20
FR2099527A1 (enExample) 1972-03-17
FR2099527B1 (enExample) 1974-04-05
NL7110058A (enExample) 1972-01-25
DE2136239A1 (de) 1972-02-17

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees