JPS539482A - Mis semiconductor device and its production - Google Patents

Mis semiconductor device and its production

Info

Publication number
JPS539482A
JPS539482A JP8347076A JP8347076A JPS539482A JP S539482 A JPS539482 A JP S539482A JP 8347076 A JP8347076 A JP 8347076A JP 8347076 A JP8347076 A JP 8347076A JP S539482 A JPS539482 A JP S539482A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mis semiconductor
mis
moslsi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8347076A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8347076A priority Critical patent/JPS539482A/en
Publication of JPS539482A publication Critical patent/JPS539482A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To produce a Si gate MOSLSI of a V groove structure and increase the scale of integration by obtaining active regions through self-alignment and providing ohmic electrodes to the lower part of the side walls of grooves.
COPYRIGHT: (C)1978,JPO&Japio
JP8347076A 1976-07-15 1976-07-15 Mis semiconductor device and its production Pending JPS539482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8347076A JPS539482A (en) 1976-07-15 1976-07-15 Mis semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8347076A JPS539482A (en) 1976-07-15 1976-07-15 Mis semiconductor device and its production

Publications (1)

Publication Number Publication Date
JPS539482A true JPS539482A (en) 1978-01-27

Family

ID=13803345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8347076A Pending JPS539482A (en) 1976-07-15 1976-07-15 Mis semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS539482A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492185A (en) * 1977-12-27 1979-07-21 Burroughs Corp Field effect transistor
JPS56140751A (en) * 1980-04-04 1981-11-04 Oki Electric Ind Co Ltd Test signal transmitting and receiving system
JPS56143786A (en) * 1980-04-09 1981-11-09 Nec Corp Remote maintenance system
JPS63177565A (en) * 1987-01-19 1988-07-21 Nec Corp Semiconductor integrated circuit device and manufacture of same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492185A (en) * 1977-12-27 1979-07-21 Burroughs Corp Field effect transistor
JPS6320024B2 (en) * 1977-12-27 1988-04-26 Yunishisu Corp
JPS56140751A (en) * 1980-04-04 1981-11-04 Oki Electric Ind Co Ltd Test signal transmitting and receiving system
JPS56143786A (en) * 1980-04-09 1981-11-09 Nec Corp Remote maintenance system
JPS63177565A (en) * 1987-01-19 1988-07-21 Nec Corp Semiconductor integrated circuit device and manufacture of same

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