GB1238598A - - Google Patents

Info

Publication number
GB1238598A
GB1238598A GB1238598DA GB1238598A GB 1238598 A GB1238598 A GB 1238598A GB 1238598D A GB1238598D A GB 1238598DA GB 1238598 A GB1238598 A GB 1238598A
Authority
GB
United Kingdom
Prior art keywords
cathode
anode
electron
aperture
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1238598A publication Critical patent/GB1238598A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
GB1238598D 1969-06-17 1969-06-17 Expired GB1238598A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3065269 1969-06-17

Publications (1)

Publication Number Publication Date
GB1238598A true GB1238598A (enrdf_load_stackoverflow) 1971-07-07

Family

ID=10311001

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1238598D Expired GB1238598A (enrdf_load_stackoverflow) 1969-06-17 1969-06-17

Country Status (1)

Country Link
GB (1) GB1238598A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011387A1 (en) * 1978-10-30 1980-05-28 The Electricity Council Glow discharge heating devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011387A1 (en) * 1978-10-30 1980-05-28 The Electricity Council Glow discharge heating devices

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Legal Events

Date Code Title Description
PS Patent sealed
48S Specification amended (sect. 8/1949)
SPA Amended specification published
PCNP Patent ceased through non-payment of renewal fee