GB1291221A - Electron probe forming system - Google Patents

Electron probe forming system

Info

Publication number
GB1291221A
GB1291221A GB21770/69A GB2177069A GB1291221A GB 1291221 A GB1291221 A GB 1291221A GB 21770/69 A GB21770/69 A GB 21770/69A GB 2177069 A GB2177069 A GB 2177069A GB 1291221 A GB1291221 A GB 1291221A
Authority
GB
United Kingdom
Prior art keywords
anode
cathode
focus
lens
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB21770/69A
Inventor
Kenneth Charles Arthur Smith
David John Swann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB21770/69A priority Critical patent/GB1291221A/en
Priority to DE19702000889 priority patent/DE2000889A1/en
Priority to US00199899A priority patent/US3728570A/en
Publication of GB1291221A publication Critical patent/GB1291221A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1291221 Electron guns K C A SMITH and D J SWANN 7 Oct 1969 [7 July 1968 29 April 1969] 27117/68 and 21770/69 Heading H1D An electron gun for a scanning electron microscope comprises a cathode 1 and an anode 5 disposed within a magnetic lens. The cathode is preferably of the field emission type and may include a tip of lanthanum hexaboride about 100 Š in diameter, and the cathode support may be mounted on a bellows (15, Fig. 1, not shown) so that its position may be adjusted. The lens includes two polepieces 8 and 10 each with a central aperture, and may be adapted to operate with a short focal length and unit magnification. The anode 5 comprises a tube with a small aperture at one end for the beam, and the tube is connected to its own vacuum pump (not shown) so that the pressure within it may be lower by an order of magnitude than that in the rest of the apparatus. A control electrode 18 may be provided, as shown in Fig. 4, and may be pulsed to extend the life of the cathode. A beam limiting diaphragm 19 may be provided in the end-wall of the anode. Electron bombardment of the anode, with consequent release of gas, may be avoided by arranging that the magnetic lens produces a first focus at the anode aperture and a second focus in the plane 17 (Fig. 3, not shown). In another mode of operation, the magnetic lens magnifies strongly, and a second lens (not shown) is provided to demagnify the focus to produce the final probe.
GB21770/69A 1968-07-07 1968-07-07 Electron probe forming system Expired GB1291221A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB21770/69A GB1291221A (en) 1968-07-07 1968-07-07 Electron probe forming system
DE19702000889 DE2000889A1 (en) 1968-07-07 1970-01-09 Electron gun and electron beam device provided with it
US00199899A US3728570A (en) 1968-07-07 1971-11-18 Electron probe forming system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB21770/69A GB1291221A (en) 1968-07-07 1968-07-07 Electron probe forming system
GB2711768 1968-07-07

Publications (1)

Publication Number Publication Date
GB1291221A true GB1291221A (en) 1972-10-04

Family

ID=26255509

Family Applications (1)

Application Number Title Priority Date Filing Date
GB21770/69A Expired GB1291221A (en) 1968-07-07 1968-07-07 Electron probe forming system

Country Status (3)

Country Link
US (1) US3728570A (en)
DE (1) DE2000889A1 (en)
GB (1) GB1291221A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4544845A (en) * 1982-05-24 1985-10-01 University de Reims Champagne Ardenne Electron gun with a field emission cathode and a magnetic lens
DE3919829A1 (en) * 1988-06-17 1989-12-21 Hitachi Ltd ELECTRONIC CANNON SYSTEM WITH FIELD EMISSION

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015109B1 (en) * 1970-12-24 1975-06-02
DE2628584C3 (en) * 1975-06-27 1981-04-16 Hitachi, Ltd., Tokyo Field emission cathode and method of making a needle-shaped cathode tip therefor
FR2417179A1 (en) * 1978-02-08 1979-09-07 Hitachi Ltd ELECTRONIC CANNON WITH FIELD EMISSION
JPH0766575B2 (en) * 1986-02-17 1995-07-19 株式会社日立製作所 Information reproducing device by electron beam
US8716925B2 (en) * 2011-08-09 2014-05-06 L-3 Communications Corporation Adjustable perveance electron gun header

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH220324A (en) * 1939-07-22 1942-03-31 Fides Gmbh Electron microscope.
US2897396A (en) * 1955-05-10 1959-07-28 Vakutronik Veb Electron emitting system
DE1099659B (en) * 1958-08-30 1961-02-16 Zeiss Carl Fa Shielding device
NL278366A (en) * 1961-05-27
US3312856A (en) * 1963-03-26 1967-04-04 Gen Electric Rhenium supported metallic boride cathode emitters
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
US3462635A (en) * 1966-10-24 1969-08-19 Ibm Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration
US3532923A (en) * 1969-03-17 1970-10-06 Ibm Pyrolytic graphite support for lanthanum hexaboride cathode emitter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4544845A (en) * 1982-05-24 1985-10-01 University de Reims Champagne Ardenne Electron gun with a field emission cathode and a magnetic lens
DE3919829A1 (en) * 1988-06-17 1989-12-21 Hitachi Ltd ELECTRONIC CANNON SYSTEM WITH FIELD EMISSION
US4945247A (en) * 1988-06-17 1990-07-31 Hitachi, Ltd. Field emission electron gun system

Also Published As

Publication number Publication date
DE2000889A1 (en) 1971-01-21
US3728570A (en) 1973-04-17

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee