GB1222465A - Improvements in or relating to apparatus for the drawing of monocrystalline semiconductor rods - Google Patents
Improvements in or relating to apparatus for the drawing of monocrystalline semiconductor rodsInfo
- Publication number
- GB1222465A GB1222465A GB3725569A GB3725569A GB1222465A GB 1222465 A GB1222465 A GB 1222465A GB 3725569 A GB3725569 A GB 3725569A GB 3725569 A GB3725569 A GB 3725569A GB 1222465 A GB1222465 A GB 1222465A
- Authority
- GB
- United Kingdom
- Prior art keywords
- crucible
- cylindrical
- pulling
- shield
- july
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- 229910002804 graphite Inorganic materials 0.000 abstract 2
- 239000010439 graphite Substances 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681769860 DE1769860A1 (de) | 1968-07-26 | 1968-07-26 | Vorrichtung zum Ziehen von versetzungsfreien Halbleitereinkristallstaeben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1222465A true GB1222465A (en) | 1971-02-17 |
Family
ID=5700303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3725569A Expired GB1222465A (en) | 1968-07-26 | 1969-07-24 | Improvements in or relating to apparatus for the drawing of monocrystalline semiconductor rods |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1769860A1 (enrdf_load_stackoverflow) |
| DK (1) | DK123696B (enrdf_load_stackoverflow) |
| FR (1) | FR2013820A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1222465A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6457434B1 (en) * | 2001-02-22 | 2002-10-01 | Rosita de Keersmaeker | Wet/dry tissue dispenser |
| US8263914B2 (en) | 2008-08-27 | 2012-09-11 | AMG IdealCast Corporation | Cartridge heater and method of use |
| CN118745592A (zh) * | 2024-06-25 | 2024-10-08 | 青岛华芯晶电科技有限公司 | 一种传动旋转移动式晶体生长高压炉 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4116642A (en) * | 1976-12-15 | 1978-09-26 | Western Electric Company, Inc. | Method and apparatus for avoiding undesirable deposits in crystal growing operations |
| US4190630A (en) * | 1978-01-03 | 1980-02-26 | Vsesojuzny Nauchno-Isslekovatelsky Institut Monokristallov Stsintillyatsionnykh Materialov I Osobo Chistykh Khimicheskikh Veschestv | Apparatus for pulling single crystals from melt |
| DE3005492C2 (de) * | 1980-02-14 | 1983-10-27 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur Herstellung reinster Einkristalle durch Tiegelziehen nach Czochralski |
| US4390505A (en) * | 1981-03-30 | 1983-06-28 | Mobil Solar Energy Corporation | Crystal growth apparatus |
| US4450333A (en) * | 1982-05-28 | 1984-05-22 | At&T Technologies, Inc. | Zirconia induction furnace |
| US4608473A (en) * | 1982-05-28 | 1986-08-26 | At&T Technologies, Inc. | Modified zirconia induction furnace |
| JPS6153187A (ja) * | 1984-08-24 | 1986-03-17 | Sony Corp | 単結晶成長装置 |
| US4594127A (en) * | 1984-09-17 | 1986-06-10 | General Signal Corporation | Method and apparatus for growing crystals |
| US5207992A (en) * | 1986-12-26 | 1993-05-04 | Toshiba Ceramics Co., Ltd. | Silicon single crystal pulling-up apparatus |
| JPS63166790A (ja) * | 1986-12-26 | 1988-07-09 | Toshiba Ceramics Co Ltd | シリコン単結晶引上装置 |
| US5180562A (en) * | 1987-10-03 | 1993-01-19 | Leybold Aktiengesellschaft | Apparatus for pulling monocrystals |
| DE19754961A1 (de) * | 1997-12-11 | 1999-06-17 | Leybold Systems Gmbh | Vorrichtung zum Halten eines Kristallblockes |
-
1968
- 1968-07-26 DE DE19681769860 patent/DE1769860A1/de active Pending
-
1969
- 1969-07-24 GB GB3725569A patent/GB1222465A/en not_active Expired
- 1969-07-24 DK DK402869A patent/DK123696B/da unknown
- 1969-07-25 FR FR6925536A patent/FR2013820A1/fr not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6457434B1 (en) * | 2001-02-22 | 2002-10-01 | Rosita de Keersmaeker | Wet/dry tissue dispenser |
| US8263914B2 (en) | 2008-08-27 | 2012-09-11 | AMG IdealCast Corporation | Cartridge heater and method of use |
| CN118745592A (zh) * | 2024-06-25 | 2024-10-08 | 青岛华芯晶电科技有限公司 | 一种传动旋转移动式晶体生长高压炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1769860A1 (de) | 1971-11-11 |
| FR2013820A1 (enrdf_load_stackoverflow) | 1970-04-10 |
| DK123696B (da) | 1972-07-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
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