DK123696B - Apparat til trækning af fejlstedfrie halvlederenkeltkrystalstave. - Google Patents

Apparat til trækning af fejlstedfrie halvlederenkeltkrystalstave.

Info

Publication number
DK123696B
DK123696B DK402869A DK402869A DK123696B DK 123696 B DK123696 B DK 123696B DK 402869 A DK402869 A DK 402869A DK 402869 A DK402869 A DK 402869A DK 123696 B DK123696 B DK 123696B
Authority
DK
Denmark
Prior art keywords
single crystal
semiconductor single
free semiconductor
crystal rods
drawing fault
Prior art date
Application number
DK402869A
Other languages
English (en)
Inventor
M Kellerbauer
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK123696B publication Critical patent/DK123696B/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/32—Seed holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK402869A 1968-07-26 1969-07-24 Apparat til trækning af fejlstedfrie halvlederenkeltkrystalstave. DK123696B (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681769860 DE1769860A1 (de) 1968-07-26 1968-07-26 Vorrichtung zum Ziehen von versetzungsfreien Halbleitereinkristallstaeben

Publications (1)

Publication Number Publication Date
DK123696B true DK123696B (da) 1972-07-24

Family

ID=5700303

Family Applications (1)

Application Number Title Priority Date Filing Date
DK402869A DK123696B (da) 1968-07-26 1969-07-24 Apparat til trækning af fejlstedfrie halvlederenkeltkrystalstave.

Country Status (4)

Country Link
DE (1) DE1769860A1 (da)
DK (1) DK123696B (da)
FR (1) FR2013820A1 (da)
GB (1) GB1222465A (da)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4116642A (en) * 1976-12-15 1978-09-26 Western Electric Company, Inc. Method and apparatus for avoiding undesirable deposits in crystal growing operations
US4190630A (en) * 1978-01-03 1980-02-26 Vsesojuzny Nauchno-Isslekovatelsky Institut Monokristallov Stsintillyatsionnykh Materialov I Osobo Chistykh Khimicheskikh Veschestv Apparatus for pulling single crystals from melt
DE3005492C2 (de) * 1980-02-14 1983-10-27 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Herstellung reinster Einkristalle durch Tiegelziehen nach Czochralski
US4390505A (en) * 1981-03-30 1983-06-28 Mobil Solar Energy Corporation Crystal growth apparatus
US4450333A (en) * 1982-05-28 1984-05-22 At&T Technologies, Inc. Zirconia induction furnace
US4608473A (en) * 1982-05-28 1986-08-26 At&T Technologies, Inc. Modified zirconia induction furnace
JPS6153187A (ja) * 1984-08-24 1986-03-17 Sony Corp 単結晶成長装置
US4594127A (en) * 1984-09-17 1986-06-10 General Signal Corporation Method and apparatus for growing crystals
US5207992A (en) * 1986-12-26 1993-05-04 Toshiba Ceramics Co., Ltd. Silicon single crystal pulling-up apparatus
JPS63166790A (ja) * 1986-12-26 1988-07-09 Toshiba Ceramics Co Ltd シリコン単結晶引上装置
US5180562A (en) * 1987-10-03 1993-01-19 Leybold Aktiengesellschaft Apparatus for pulling monocrystals
DE19754961A1 (de) * 1997-12-11 1999-06-17 Leybold Systems Gmbh Vorrichtung zum Halten eines Kristallblockes
US6457434B1 (en) * 2001-02-22 2002-10-01 Rosita de Keersmaeker Wet/dry tissue dispenser
US8263914B2 (en) 2008-08-27 2012-09-11 AMG IdealCast Corporation Cartridge heater and method of use

Also Published As

Publication number Publication date
GB1222465A (en) 1971-02-17
DE1769860A1 (de) 1971-11-11
FR2013820A1 (da) 1970-04-10

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