GB1095587A - - Google Patents
Info
- Publication number
- GB1095587A GB1095587A GB1095587DA GB1095587A GB 1095587 A GB1095587 A GB 1095587A GB 1095587D A GB1095587D A GB 1095587DA GB 1095587 A GB1095587 A GB 1095587A
- Authority
- GB
- United Kingdom
- Prior art keywords
- disc
- cylinder
- crucible
- rod
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
1,095,587. Crystal-pulling. SIEMENS & HALSKE A.G. Sept. 26, 1966 [Sept. 24, 1965], No. 42809/66. Heading B1S A monocrystalline silicon rod is pulled from a melt 4 in a quartz-lined graphite crucible 1 which is heated by radiation inwards from a resistance heated graphite cylinder 5 and upwards from a resistance heated graphite disc 8, the heating power of the two heating means being separately adjustable to maintain the diameter of the rod constant. The heating power of the cylinder may be maintained constant while that of the disc is increased or decreased as required. The disc and cylinder may be slotted from either side alternatively (Fig. 3) or spirally. The disc may have an upper convex surface (Fig. 2). The distance between the disc and the base of the crucible may be equal a quarter of the crucible diameter. The distance between the disc and the cylinder may equal the maximum thickness of the disc. The melt and/or rod may be rotated. A rotary shaft 3 may pass axially through the disc.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0099649 | 1965-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1095587A true GB1095587A (en) |
Family
ID=7522433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1095587D Active GB1095587A (en) | 1965-09-24 |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1519881C3 (en) |
FR (1) | FR1515916A (en) |
GB (1) | GB1095587A (en) |
NL (1) | NL6611013A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5180562A (en) * | 1987-10-03 | 1993-01-19 | Leybold Aktiengesellschaft | Apparatus for pulling monocrystals |
US5429176A (en) * | 1992-09-25 | 1995-07-04 | T&N Technology Limited | Thermal radiation baffle for apparatus for use in directional solidification |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4116642A (en) * | 1976-12-15 | 1978-09-26 | Western Electric Company, Inc. | Method and apparatus for avoiding undesirable deposits in crystal growing operations |
DE3316546C1 (en) * | 1983-05-06 | 1984-04-26 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Cold crucible for melting and crystallizing non-metallic inorganic compounds |
JPS60103097A (en) * | 1983-11-08 | 1985-06-07 | Sumitomo Electric Ind Ltd | Device for pulling up single crystal |
DE3733487C2 (en) * | 1987-10-03 | 1997-08-14 | Leybold Ag | Device for pulling single crystals |
DE19652543A1 (en) * | 1996-12-17 | 1998-06-18 | Wacker Siltronic Halbleitermat | Process for producing a silicon single crystal and heater for carrying out the process |
-
0
- GB GB1095587D patent/GB1095587A/en active Active
-
1965
- 1965-09-24 DE DE19651519881 patent/DE1519881C3/en not_active Expired
-
1966
- 1966-08-04 NL NL6611013A patent/NL6611013A/xx unknown
- 1966-09-22 FR FR77282A patent/FR1515916A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5180562A (en) * | 1987-10-03 | 1993-01-19 | Leybold Aktiengesellschaft | Apparatus for pulling monocrystals |
US5429176A (en) * | 1992-09-25 | 1995-07-04 | T&N Technology Limited | Thermal radiation baffle for apparatus for use in directional solidification |
Also Published As
Publication number | Publication date |
---|---|
NL6611013A (en) | 1967-03-28 |
DE1519881A1 (en) | 1969-02-20 |
DE1519881B2 (en) | 1973-06-14 |
DE1519881C3 (en) | 1974-01-10 |
FR1515916A (en) | 1968-03-08 |
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