FR3069339B1 - Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs - Google Patents
Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs Download PDFInfo
- Publication number
- FR3069339B1 FR3069339B1 FR1756928A FR1756928A FR3069339B1 FR 3069339 B1 FR3069339 B1 FR 3069339B1 FR 1756928 A FR1756928 A FR 1756928A FR 1756928 A FR1756928 A FR 1756928A FR 3069339 B1 FR3069339 B1 FR 3069339B1
- Authority
- FR
- France
- Prior art keywords
- nano
- block copolymer
- domains
- orientation
- checking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/34—Applying different liquids or other fluent materials simultaneously
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
- B05D3/065—After-treatment
- B05D3/067—Curing or cross-linking the coating
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Materials For Photolithography (AREA)
Abstract
L'invention concerne un procédé de contrôle de l'orientation des nano-domaines d'un copolymère à blocs (BPC), dont l'interface inférieure est en contact avec la surface préalablement neutralisée d'un substrat, ledit copolymère à blocs étant apte à se nano-structurer en nano-domaines avec une période (L0) déterminée, sur une épaisseur minimale (e) au moins égale à la moitié de ladite période (L0), ledit procédé étant caractérisé en ce qu'il consiste à déposer ledit copolymère à blocs (BCP) sur ledit substrat, de sorte que son épaisseur totale (E+e) soit au moins deux fois supérieure et de préférence au moins trois fois supérieure à ladite épaisseur minimale (e), puis de déposer sur ledit copolymère à blocs (BCP) un matériau d'interface permettant de l'isoler de l'atmosphère ambiante.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1756928A FR3069339B1 (fr) | 2017-07-21 | 2017-07-21 | Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs |
EP18752826.0A EP3655820A1 (fr) | 2017-07-21 | 2018-07-20 | Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs |
CN201880048320.0A CN110945426A (zh) | 2017-07-21 | 2018-07-20 | 用于控制嵌段共聚物的纳米畴取向的方法 |
PCT/FR2018/051857 WO2019016488A1 (fr) | 2017-07-21 | 2018-07-20 | Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs |
KR1020207001695A KR20200020846A (ko) | 2017-07-21 | 2018-07-20 | 블록 공중합체의 나노도메인들의 배향을 제어하기 위한 방법 |
TW107125123A TWI686416B (zh) | 2017-07-21 | 2018-07-20 | 控制嵌段共聚物的奈米域定向之方法 |
JP2020501785A JP2020527860A (ja) | 2017-07-21 | 2018-07-20 | ブロックコポリマーのナノドメインの配向を制御するための方法 |
SG11202000393VA SG11202000393VA (en) | 2017-07-21 | 2018-07-20 | Method for controlling the orientation of nanodomains of a block copolymer |
US16/631,093 US20200150535A1 (en) | 2017-07-21 | 2018-07-20 | Process for controlling the orientation of the nanodomains of a block copolymer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1756928A FR3069339B1 (fr) | 2017-07-21 | 2017-07-21 | Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs |
FR1756928 | 2017-07-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3069339A1 FR3069339A1 (fr) | 2019-01-25 |
FR3069339B1 true FR3069339B1 (fr) | 2021-05-14 |
Family
ID=60382317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1756928A Expired - Fee Related FR3069339B1 (fr) | 2017-07-21 | 2017-07-21 | Procede de controle de l'orientation des nano-domaines d'un copolymere a blocs |
Country Status (9)
Country | Link |
---|---|
US (1) | US20200150535A1 (fr) |
EP (1) | EP3655820A1 (fr) |
JP (1) | JP2020527860A (fr) |
KR (1) | KR20200020846A (fr) |
CN (1) | CN110945426A (fr) |
FR (1) | FR3069339B1 (fr) |
SG (1) | SG11202000393VA (fr) |
TW (1) | TWI686416B (fr) |
WO (1) | WO2019016488A1 (fr) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013119832A1 (fr) | 2012-02-10 | 2013-08-15 | Board Of Regents, The University Of Texas System | Couche superficielle à base d'un copolymère d'anhydride permettant d'ajuster l'orientation de copolymères séquencés en couche mince |
FR2990885B1 (fr) * | 2012-05-23 | 2014-09-19 | Arkema France | Procede de preparation de surfaces |
US20140065379A1 (en) * | 2012-08-31 | 2014-03-06 | Wisconsin Alumni Research Foundation | Topcoat surfaces for directing the assembly of block copolymer films on chemically patterned surfaces |
JP2014164043A (ja) * | 2013-02-22 | 2014-09-08 | Tokyo Ohka Kogyo Co Ltd | パターン形成方法、及び、相分離構造を含む構造体の製造方法 |
JP6027912B2 (ja) * | 2013-02-22 | 2016-11-16 | 東京応化工業株式会社 | 相分離構造を含む構造体の製造方法、及びパターン形成方法、並びにトップコート材料 |
US9802400B2 (en) * | 2013-06-24 | 2017-10-31 | Dow Global Technologies Llc | Orientation control layer formed on a free top surface of a first block copolymer from a mixture of first and second block copolymers |
US9054043B2 (en) * | 2013-10-30 | 2015-06-09 | HGST Netherlands B.V. | Method for directed self-assembly (DSA) of block copolymers |
FR3025937B1 (fr) * | 2014-09-16 | 2017-11-24 | Commissariat Energie Atomique | Procede de grapho-epitaxie pour realiser des motifs a la surface d'un substrat |
KR101932799B1 (ko) * | 2015-02-17 | 2018-12-26 | 주식회사 엘지화학 | 블록 공중합체 자기 조립 패턴의 습식 식각 방법 |
FR3037071B1 (fr) * | 2015-06-02 | 2019-06-21 | Arkema France | Procede de reduction de la defectivite d'un film de copolymere a blocs |
FR3037070B1 (fr) * | 2015-06-02 | 2019-05-31 | Arkema France | Procede de controle de l'energie de surface a l'interface entre un copolymere a blocs et un autre compose |
JP6039028B1 (ja) * | 2015-09-11 | 2016-12-07 | 株式会社東芝 | 自己組織化材料及びパターン形成方法 |
FR3045645B1 (fr) * | 2015-12-18 | 2019-07-05 | Arkema France | Procede de reduction des defauts dans un film ordonne de copolymeres a blocs |
-
2017
- 2017-07-21 FR FR1756928A patent/FR3069339B1/fr not_active Expired - Fee Related
-
2018
- 2018-07-20 WO PCT/FR2018/051857 patent/WO2019016488A1/fr unknown
- 2018-07-20 JP JP2020501785A patent/JP2020527860A/ja active Pending
- 2018-07-20 SG SG11202000393VA patent/SG11202000393VA/en unknown
- 2018-07-20 TW TW107125123A patent/TWI686416B/zh not_active IP Right Cessation
- 2018-07-20 CN CN201880048320.0A patent/CN110945426A/zh active Pending
- 2018-07-20 US US16/631,093 patent/US20200150535A1/en not_active Abandoned
- 2018-07-20 KR KR1020207001695A patent/KR20200020846A/ko not_active Application Discontinuation
- 2018-07-20 EP EP18752826.0A patent/EP3655820A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2020527860A (ja) | 2020-09-10 |
FR3069339A1 (fr) | 2019-01-25 |
SG11202000393VA (en) | 2020-02-27 |
US20200150535A1 (en) | 2020-05-14 |
KR20200020846A (ko) | 2020-02-26 |
EP3655820A1 (fr) | 2020-05-27 |
WO2019016488A1 (fr) | 2019-01-24 |
CN110945426A (zh) | 2020-03-31 |
TW201920321A (zh) | 2019-06-01 |
TWI686416B (zh) | 2020-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLSC | Publication of the preliminary search report |
Effective date: 20190125 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
ST | Notification of lapse |
Effective date: 20230305 |